8/28/2011	11:20:11 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	11:20:12 AM	Recipe started at 11:20 AM
8/28/2011	11:20:12 AM	Helium valve closed
8/28/2011	11:20:12 AM	H2 valve closed
8/28/2011	11:20:12 AM	BCl3 valve closed
8/28/2011	11:20:12 AM	PH3 valve closed
8/28/2011	11:20:12 AM	SiCl4 pre valve closed
8/28/2011	11:20:12 AM	SiCl4 post valve closed
8/28/2011	11:20:12 AM	Main Vac valve closed
8/28/2011	11:20:12 AM	Bypass valve closed
8/28/2011	11:20:12 AM	Bubbler valve closed
8/28/2011	11:20:12 AM	Helium MFC set to  0.000000
8/28/2011	11:20:12 AM	H2 MFC set to  0.000000
8/28/2011	11:20:12 AM	BCl3 MFC set to  0.000000
8/28/2011	11:20:12 AM	PHl3 MFC set to  0.000000
8/28/2011	11:20:12 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:20:12 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:20:12 AM	Tube furnace set to 0
8/28/2011	11:20:15 AM	H2 valve closed
8/28/2011	11:20:15 AM	BCl3 valve closed
8/28/2011	11:20:15 AM	PH3 valve closed
8/28/2011	11:20:15 AM	SiCl4 pre valve closed
8/28/2011	11:20:15 AM	SiCl4 post valve closed
8/28/2011	11:20:15 AM	Main Vac valve closed
8/28/2011	11:20:15 AM	Bypass valve closed
8/28/2011	11:20:15 AM	Bubbler valve closed
8/28/2011	11:20:15 AM	Helium valve opened
8/28/2011	11:20:15 AM	Helium MFC set to  500.000000
8/28/2011	11:20:15 AM	H2 MFC set to  0.000000
8/28/2011	11:20:15 AM	BCl3 MFC set to  0.000000
8/28/2011	11:20:15 AM	PHl3 MFC set to  0.000000
8/28/2011	11:20:15 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:20:15 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:20:16 AM	Tube furnace set to 0
8/28/2011	11:21:20 AM	Helium valve closed
8/28/2011	11:21:20 AM	H2 valve closed
8/28/2011	11:21:20 AM	BCl3 valve closed
8/28/2011	11:21:20 AM	PH3 valve closed
8/28/2011	11:21:20 AM	SiCl4 pre valve closed
8/28/2011	11:21:20 AM	SiCl4 post valve closed
8/28/2011	11:21:20 AM	Main Vac valve closed
8/28/2011	11:21:20 AM	Bypass valve closed
8/28/2011	11:21:20 AM	Bubbler valve closed
8/28/2011	11:21:20 AM	Helium MFC set to  0.000000
8/28/2011	11:21:20 AM	H2 MFC set to  0.000000
8/28/2011	11:21:20 AM	BCl3 MFC set to  0.000000
8/28/2011	11:21:20 AM	PHl3 MFC set to  0.000000
8/28/2011	11:21:20 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:21:20 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:21:21 AM	Tube furnace set to 0
8/28/2011	11:21:22 AM	Run finished at 11:21 AM
8/28/2011	11:21:22 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	11:23:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	11:23:13 AM	Recipe started at 11:23 AM
8/28/2011	11:23:13 AM	Helium valve closed
8/28/2011	11:23:13 AM	H2 valve closed
8/28/2011	11:23:13 AM	BCl3 valve closed
8/28/2011	11:23:13 AM	PH3 valve closed
8/28/2011	11:23:13 AM	SiCl4 pre valve closed
8/28/2011	11:23:13 AM	SiCl4 post valve closed
8/28/2011	11:23:13 AM	Main Vac valve closed
8/28/2011	11:23:13 AM	Bubbler valve closed
8/28/2011	11:23:13 AM	Bypass valve opened
8/28/2011	11:23:13 AM	Helium MFC set to  0.000000
8/28/2011	11:23:13 AM	H2 MFC set to  0.000000
8/28/2011	11:23:13 AM	BCl3 MFC set to  0.000000
8/28/2011	11:23:13 AM	PHl3 MFC set to  0.000000
8/28/2011	11:23:13 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:23:13 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:23:13 AM	Tube furnace set to 0
8/28/2011	11:24:21 AM	Helium valve closed
8/28/2011	11:24:21 AM	H2 valve closed
8/28/2011	11:24:21 AM	BCl3 valve closed
8/28/2011	11:24:21 AM	PH3 valve closed
8/28/2011	11:24:21 AM	SiCl4 pre valve closed
8/28/2011	11:24:21 AM	SiCl4 post valve closed
8/28/2011	11:24:21 AM	Main Vac valve closed
8/28/2011	11:24:21 AM	Bubbler valve closed
8/28/2011	11:24:21 AM	Bypass valve opened
8/28/2011	11:24:21 AM	Helium MFC set to  0.000000
8/28/2011	11:24:21 AM	H2 MFC set to  0.000000
8/28/2011	11:24:21 AM	BCl3 MFC set to  0.000000
8/28/2011	11:24:21 AM	PHl3 MFC set to  0.000000
8/28/2011	11:24:21 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:24:21 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:24:21 AM	Tube furnace set to 0
8/28/2011	11:25:22 AM	Helium valve closed
8/28/2011	11:25:22 AM	H2 valve closed
8/28/2011	11:25:22 AM	BCl3 valve closed
8/28/2011	11:25:22 AM	PH3 valve closed
8/28/2011	11:25:22 AM	SiCl4 pre valve closed
8/28/2011	11:25:22 AM	SiCl4 post valve closed
8/28/2011	11:25:22 AM	Bypass valve closed
8/28/2011	11:25:22 AM	Bubbler valve closed
8/28/2011	11:25:22 AM	Main Vac valve opened
8/28/2011	11:25:22 AM	Helium MFC set to  0.000000
8/28/2011	11:25:22 AM	H2 MFC set to  0.000000
8/28/2011	11:25:22 AM	BCl3 MFC set to  0.000000
8/28/2011	11:25:22 AM	PHl3 MFC set to  0.000000
8/28/2011	11:25:22 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:25:22 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:25:22 AM	Tube furnace set to 0
8/28/2011	11:25:23 AM	Run finished at 11:25 AM
8/28/2011	11:25:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	11:28:54 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	11:28:55 AM	Recipe started at 11:28 AM
8/28/2011	11:28:55 AM	Helium valve closed
8/28/2011	11:28:55 AM	H2 valve closed
8/28/2011	11:28:55 AM	BCl3 valve closed
8/28/2011	11:28:55 AM	PH3 valve closed
8/28/2011	11:28:55 AM	SiCl4 pre valve closed
8/28/2011	11:28:55 AM	SiCl4 post valve closed
8/28/2011	11:28:55 AM	Main Vac valve closed
8/28/2011	11:28:55 AM	Bypass valve closed
8/28/2011	11:28:55 AM	Bubbler valve closed
8/28/2011	11:28:55 AM	Helium MFC set to  0.000000
8/28/2011	11:28:55 AM	H2 MFC set to  0.000000
8/28/2011	11:28:55 AM	BCl3 MFC set to  0.000000
8/28/2011	11:28:55 AM	PHl3 MFC set to  0.000000
8/28/2011	11:28:55 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:28:55 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:28:55 AM	Tube furnace set to 0
8/28/2011	11:28:58 AM	H2 valve closed
8/28/2011	11:28:58 AM	BCl3 valve closed
8/28/2011	11:28:58 AM	PH3 valve closed
8/28/2011	11:28:58 AM	SiCl4 pre valve closed
8/28/2011	11:28:58 AM	SiCl4 post valve closed
8/28/2011	11:28:58 AM	Main Vac valve closed
8/28/2011	11:28:58 AM	Bypass valve closed
8/28/2011	11:28:58 AM	Bubbler valve closed
8/28/2011	11:28:58 AM	Helium valve opened
8/28/2011	11:28:58 AM	Helium MFC set to  500.000000
8/28/2011	11:28:58 AM	H2 MFC set to  0.000000
8/28/2011	11:28:58 AM	BCl3 MFC set to  0.000000
8/28/2011	11:28:58 AM	PHl3 MFC set to  0.000000
8/28/2011	11:28:58 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:28:58 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:28:58 AM	Tube furnace set to 0
8/28/2011	11:30:04 AM	Helium valve closed
8/28/2011	11:30:04 AM	H2 valve closed
8/28/2011	11:30:04 AM	BCl3 valve closed
8/28/2011	11:30:04 AM	PH3 valve closed
8/28/2011	11:30:04 AM	SiCl4 pre valve closed
8/28/2011	11:30:04 AM	SiCl4 post valve closed
8/28/2011	11:30:04 AM	Main Vac valve closed
8/28/2011	11:30:04 AM	Bypass valve closed
8/28/2011	11:30:04 AM	Bubbler valve closed
8/28/2011	11:30:04 AM	Helium MFC set to  0.000000
8/28/2011	11:30:04 AM	H2 MFC set to  0.000000
8/28/2011	11:30:04 AM	BCl3 MFC set to  0.000000
8/28/2011	11:30:04 AM	PHl3 MFC set to  0.000000
8/28/2011	11:30:04 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:30:04 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:30:04 AM	Tube furnace set to 0
8/28/2011	11:30:05 AM	Run finished at 11:30 AM
8/28/2011	11:30:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	11:32:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	11:32:18 AM	Recipe started at 11:32 AM
8/28/2011	11:32:18 AM	Helium valve closed
8/28/2011	11:32:18 AM	H2 valve closed
8/28/2011	11:32:18 AM	BCl3 valve closed
8/28/2011	11:32:18 AM	PH3 valve closed
8/28/2011	11:32:18 AM	SiCl4 pre valve closed
8/28/2011	11:32:18 AM	SiCl4 post valve closed
8/28/2011	11:32:18 AM	Main Vac valve closed
8/28/2011	11:32:18 AM	Bubbler valve closed
8/28/2011	11:32:18 AM	Bypass valve opened
8/28/2011	11:32:18 AM	Helium MFC set to  0.000000
8/28/2011	11:32:18 AM	H2 MFC set to  0.000000
8/28/2011	11:32:18 AM	BCl3 MFC set to  0.000000
8/28/2011	11:32:18 AM	PHl3 MFC set to  0.000000
8/28/2011	11:32:18 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:32:18 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:32:18 AM	Tube furnace set to 0
8/28/2011	11:33:23 AM	Helium valve closed
8/28/2011	11:33:23 AM	H2 valve closed
8/28/2011	11:33:23 AM	BCl3 valve closed
8/28/2011	11:33:23 AM	PH3 valve closed
8/28/2011	11:33:23 AM	SiCl4 pre valve closed
8/28/2011	11:33:23 AM	SiCl4 post valve closed
8/28/2011	11:33:23 AM	Main Vac valve closed
8/28/2011	11:33:23 AM	Bubbler valve closed
8/28/2011	11:33:23 AM	Bypass valve opened
8/28/2011	11:33:23 AM	Helium MFC set to  0.000000
8/28/2011	11:33:23 AM	H2 MFC set to  0.000000
8/28/2011	11:33:23 AM	BCl3 MFC set to  0.000000
8/28/2011	11:33:23 AM	PHl3 MFC set to  0.000000
8/28/2011	11:33:23 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:33:23 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:33:23 AM	Tube furnace set to 0
8/28/2011	11:34:23 AM	Helium valve closed
8/28/2011	11:34:23 AM	H2 valve closed
8/28/2011	11:34:23 AM	BCl3 valve closed
8/28/2011	11:34:23 AM	PH3 valve closed
8/28/2011	11:34:23 AM	SiCl4 pre valve closed
8/28/2011	11:34:23 AM	SiCl4 post valve closed
8/28/2011	11:34:23 AM	Bypass valve closed
8/28/2011	11:34:23 AM	Bubbler valve closed
8/28/2011	11:34:23 AM	Main Vac valve opened
8/28/2011	11:34:23 AM	Helium MFC set to  0.000000
8/28/2011	11:34:23 AM	H2 MFC set to  0.000000
8/28/2011	11:34:23 AM	BCl3 MFC set to  0.000000
8/28/2011	11:34:23 AM	PHl3 MFC set to  0.000000
8/28/2011	11:34:23 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:34:23 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:34:24 AM	Tube furnace set to 0
8/28/2011	11:34:25 AM	Run finished at 11:34 AM
8/28/2011	11:34:25 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	11:44:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	11:44:36 AM	Recipe started at 11:44 AM
8/28/2011	11:44:36 AM	Helium valve closed
8/28/2011	11:44:36 AM	H2 valve closed
8/28/2011	11:44:36 AM	BCl3 valve closed
8/28/2011	11:44:36 AM	PH3 valve closed
8/28/2011	11:44:36 AM	SiCl4 pre valve closed
8/28/2011	11:44:36 AM	SiCl4 post valve closed
8/28/2011	11:44:36 AM	Main Vac valve closed
8/28/2011	11:44:36 AM	Bypass valve closed
8/28/2011	11:44:36 AM	Bubbler valve closed
8/28/2011	11:44:36 AM	Helium MFC set to  0.000000
8/28/2011	11:44:36 AM	H2 MFC set to  0.000000
8/28/2011	11:44:36 AM	BCl3 MFC set to  0.000000
8/28/2011	11:44:36 AM	PHl3 MFC set to  0.000000
8/28/2011	11:44:36 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:44:36 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:44:36 AM	Tube furnace set to 0
8/28/2011	11:44:38 AM	Run aborted at 11:44 AM
8/28/2011	11:44:38 AM	Helium valve closed
8/28/2011	11:44:38 AM	H2 valve closed
8/28/2011	11:44:38 AM	BCl3 valve closed
8/28/2011	11:44:38 AM	PH3 valve closed
8/28/2011	11:44:38 AM	SiCl4 pre valve closed
8/28/2011	11:44:38 AM	SiCl4 post valve closed
8/28/2011	11:44:38 AM	Bypass valve closed
8/28/2011	11:44:38 AM	Main Vac valve closed
8/28/2011	11:44:38 AM	Bubbler valve closed
8/28/2011	11:44:38 AM	Helium MFC set to  0.000000
8/28/2011	11:44:38 AM	H2 MFC set to  0.000000
8/28/2011	11:44:38 AM	BCl3 MFC set to  0.000000
8/28/2011	11:44:38 AM	PHl3 MFC set to  0.000000
8/28/2011	11:44:38 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:44:38 AM	Tube furnace set to 0
8/28/2011	11:44:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	11:44:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/28/2011	11:44:57 AM	Recipe started at 11:44 AM
8/28/2011	11:44:57 AM	Helium valve closed
8/28/2011	11:44:57 AM	H2 valve closed
8/28/2011	11:44:57 AM	BCl3 valve closed
8/28/2011	11:44:57 AM	PH3 valve closed
8/28/2011	11:44:57 AM	SiCl4 pre valve closed
8/28/2011	11:44:57 AM	SiCl4 post valve closed
8/28/2011	11:44:57 AM	Main Vac valve closed
8/28/2011	11:44:57 AM	Bubbler valve closed
8/28/2011	11:44:57 AM	Bypass valve opened
8/28/2011	11:44:57 AM	Helium MFC set to  0.000000
8/28/2011	11:44:57 AM	H2 MFC set to  0.000000
8/28/2011	11:44:57 AM	BCl3 MFC set to  0.000000
8/28/2011	11:44:57 AM	PHl3 MFC set to  0.000000
8/28/2011	11:44:57 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:44:57 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:44:57 AM	Tube furnace set to 0
8/28/2011	11:44:58 AM	Helium valve closed
8/28/2011	11:44:58 AM	H2 valve closed
8/28/2011	11:44:58 AM	BCl3 valve closed
8/28/2011	11:44:58 AM	PH3 valve closed
8/28/2011	11:44:58 AM	SiCl4 pre valve closed
8/28/2011	11:44:58 AM	SiCl4 post valve closed
8/28/2011	11:44:58 AM	Main Vac valve closed
8/28/2011	11:44:58 AM	Bubbler valve closed
8/28/2011	11:44:58 AM	Bypass valve opened
8/28/2011	11:44:58 AM	Helium MFC set to  0.000000
8/28/2011	11:44:58 AM	H2 MFC set to  0.000000
8/28/2011	11:44:58 AM	BCl3 MFC set to  0.000000
8/28/2011	11:44:58 AM	PHl3 MFC set to  0.000000
8/28/2011	11:44:58 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:44:58 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:44:58 AM	Tube furnace set to 0
8/28/2011	11:45:00 AM	Helium valve closed
8/28/2011	11:45:00 AM	H2 valve closed
8/28/2011	11:45:00 AM	BCl3 valve closed
8/28/2011	11:45:00 AM	PH3 valve closed
8/28/2011	11:45:00 AM	SiCl4 pre valve closed
8/28/2011	11:45:00 AM	SiCl4 post valve closed
8/28/2011	11:45:00 AM	Bypass valve closed
8/28/2011	11:45:00 AM	Bubbler valve closed
8/28/2011	11:45:00 AM	Main Vac valve opened
8/28/2011	11:45:00 AM	Helium MFC set to  0.000000
8/28/2011	11:45:00 AM	H2 MFC set to  0.000000
8/28/2011	11:45:00 AM	BCl3 MFC set to  0.000000
8/28/2011	11:45:00 AM	PHl3 MFC set to  0.000000
8/28/2011	11:45:00 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:45:00 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:45:00 AM	Tube furnace set to 0
8/28/2011	11:45:30 AM	H2 valve closed
8/28/2011	11:45:30 AM	BCl3 valve closed
8/28/2011	11:45:30 AM	PH3 valve closed
8/28/2011	11:45:30 AM	SiCl4 pre valve closed
8/28/2011	11:45:30 AM	SiCl4 post valve closed
8/28/2011	11:45:30 AM	Bypass valve closed
8/28/2011	11:45:30 AM	Bubbler valve closed
8/28/2011	11:45:30 AM	Helium valve opened
8/28/2011	11:45:30 AM	Main Vac valve opened
8/28/2011	11:45:30 AM	Helium MFC set to  20.000000
8/28/2011	11:45:30 AM	H2 MFC set to  0.000000
8/28/2011	11:45:30 AM	BCl3 MFC set to  0.000000
8/28/2011	11:45:30 AM	PHl3 MFC set to  0.000000
8/28/2011	11:45:30 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:45:30 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:45:30 AM	Tube furnace set to 0
8/28/2011	11:46:00 AM	Helium valve closed
8/28/2011	11:46:00 AM	H2 valve closed
8/28/2011	11:46:00 AM	BCl3 valve closed
8/28/2011	11:46:00 AM	PH3 valve closed
8/28/2011	11:46:00 AM	SiCl4 pre valve closed
8/28/2011	11:46:00 AM	SiCl4 post valve closed
8/28/2011	11:46:00 AM	Bypass valve closed
8/28/2011	11:46:00 AM	Bubbler valve closed
8/28/2011	11:46:00 AM	Main Vac valve opened
8/28/2011	11:46:00 AM	Helium MFC set to  0.000000
8/28/2011	11:46:00 AM	H2 MFC set to  0.000000
8/28/2011	11:46:00 AM	BCl3 MFC set to  0.000000
8/28/2011	11:46:00 AM	PHl3 MFC set to  0.000000
8/28/2011	11:46:00 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:46:00 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:46:00 AM	Tube furnace set to 0
8/28/2011	11:46:30 AM	H2 valve closed
8/28/2011	11:46:30 AM	BCl3 valve closed
8/28/2011	11:46:30 AM	PH3 valve closed
8/28/2011	11:46:30 AM	SiCl4 pre valve closed
8/28/2011	11:46:30 AM	SiCl4 post valve closed
8/28/2011	11:46:30 AM	Bypass valve closed
8/28/2011	11:46:30 AM	Bubbler valve closed
8/28/2011	11:46:30 AM	Helium valve opened
8/28/2011	11:46:30 AM	Main Vac valve opened
8/28/2011	11:46:30 AM	Helium MFC set to  20.000000
8/28/2011	11:46:30 AM	H2 MFC set to  0.000000
8/28/2011	11:46:30 AM	BCl3 MFC set to  0.000000
8/28/2011	11:46:30 AM	PHl3 MFC set to  0.000000
8/28/2011	11:46:30 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:46:30 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:46:30 AM	Tube furnace set to 0
8/28/2011	11:47:01 AM	Helium valve closed
8/28/2011	11:47:01 AM	H2 valve closed
8/28/2011	11:47:01 AM	BCl3 valve closed
8/28/2011	11:47:01 AM	PH3 valve closed
8/28/2011	11:47:01 AM	SiCl4 pre valve closed
8/28/2011	11:47:01 AM	SiCl4 post valve closed
8/28/2011	11:47:01 AM	Bypass valve closed
8/28/2011	11:47:01 AM	Bubbler valve closed
8/28/2011	11:47:01 AM	Main Vac valve opened
8/28/2011	11:47:01 AM	Helium MFC set to  0.000000
8/28/2011	11:47:01 AM	H2 MFC set to  0.000000
8/28/2011	11:47:01 AM	BCl3 MFC set to  0.000000
8/28/2011	11:47:01 AM	PHl3 MFC set to  0.000000
8/28/2011	11:47:01 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:47:01 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:47:01 AM	Tube furnace set to 0
8/28/2011	11:47:31 AM	H2 valve closed
8/28/2011	11:47:31 AM	BCl3 valve closed
8/28/2011	11:47:31 AM	PH3 valve closed
8/28/2011	11:47:31 AM	SiCl4 pre valve closed
8/28/2011	11:47:31 AM	SiCl4 post valve closed
8/28/2011	11:47:31 AM	Bypass valve closed
8/28/2011	11:47:31 AM	Bubbler valve closed
8/28/2011	11:47:31 AM	Helium valve opened
8/28/2011	11:47:31 AM	Main Vac valve opened
8/28/2011	11:47:31 AM	Helium MFC set to  20.000000
8/28/2011	11:47:31 AM	H2 MFC set to  0.000000
8/28/2011	11:47:31 AM	BCl3 MFC set to  0.000000
8/28/2011	11:47:31 AM	PHl3 MFC set to  0.000000
8/28/2011	11:47:31 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:47:31 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:47:31 AM	Tube furnace set to 0
8/28/2011	11:48:01 AM	Helium valve closed
8/28/2011	11:48:01 AM	H2 valve closed
8/28/2011	11:48:01 AM	BCl3 valve closed
8/28/2011	11:48:01 AM	PH3 valve closed
8/28/2011	11:48:01 AM	SiCl4 pre valve closed
8/28/2011	11:48:01 AM	SiCl4 post valve closed
8/28/2011	11:48:01 AM	Bypass valve closed
8/28/2011	11:48:01 AM	Bubbler valve closed
8/28/2011	11:48:01 AM	Main Vac valve opened
8/28/2011	11:48:01 AM	Helium MFC set to  0.000000
8/28/2011	11:48:01 AM	H2 MFC set to  0.000000
8/28/2011	11:48:01 AM	BCl3 MFC set to  0.000000
8/28/2011	11:48:01 AM	PHl3 MFC set to  0.000000
8/28/2011	11:48:01 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:48:01 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:48:01 AM	Tube furnace set to 0
8/28/2011	11:48:31 AM	H2 valve closed
8/28/2011	11:48:31 AM	BCl3 valve closed
8/28/2011	11:48:31 AM	PH3 valve closed
8/28/2011	11:48:31 AM	SiCl4 pre valve closed
8/28/2011	11:48:31 AM	SiCl4 post valve closed
8/28/2011	11:48:31 AM	Bypass valve closed
8/28/2011	11:48:31 AM	Bubbler valve closed
8/28/2011	11:48:31 AM	Helium valve opened
8/28/2011	11:48:31 AM	Main Vac valve opened
8/28/2011	11:48:31 AM	Helium MFC set to  20.000000
8/28/2011	11:48:31 AM	H2 MFC set to  0.000000
8/28/2011	11:48:31 AM	BCl3 MFC set to  0.000000
8/28/2011	11:48:31 AM	PHl3 MFC set to  0.000000
8/28/2011	11:48:31 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:48:31 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:48:31 AM	Tube furnace set to 0
8/28/2011	11:49:01 AM	Helium valve closed
8/28/2011	11:49:01 AM	H2 valve closed
8/28/2011	11:49:01 AM	BCl3 valve closed
8/28/2011	11:49:01 AM	PH3 valve closed
8/28/2011	11:49:01 AM	SiCl4 pre valve closed
8/28/2011	11:49:01 AM	SiCl4 post valve closed
8/28/2011	11:49:01 AM	Bypass valve closed
8/28/2011	11:49:01 AM	Bubbler valve closed
8/28/2011	11:49:01 AM	Main Vac valve opened
8/28/2011	11:49:01 AM	Helium MFC set to  0.000000
8/28/2011	11:49:01 AM	H2 MFC set to  0.000000
8/28/2011	11:49:01 AM	BCl3 MFC set to  0.000000
8/28/2011	11:49:01 AM	PHl3 MFC set to  0.000000
8/28/2011	11:49:01 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:49:01 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:49:01 AM	Tube furnace set to 0
8/28/2011	11:49:31 AM	H2 valve closed
8/28/2011	11:49:31 AM	BCl3 valve closed
8/28/2011	11:49:31 AM	PH3 valve closed
8/28/2011	11:49:32 AM	SiCl4 pre valve closed
8/28/2011	11:49:32 AM	SiCl4 post valve closed
8/28/2011	11:49:32 AM	Bypass valve closed
8/28/2011	11:49:32 AM	Bubbler valve closed
8/28/2011	11:49:32 AM	Helium valve opened
8/28/2011	11:49:32 AM	Main Vac valve opened
8/28/2011	11:49:32 AM	Helium MFC set to  20.000000
8/28/2011	11:49:32 AM	H2 MFC set to  0.000000
8/28/2011	11:49:32 AM	BCl3 MFC set to  0.000000
8/28/2011	11:49:32 AM	PHl3 MFC set to  0.000000
8/28/2011	11:49:32 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:49:32 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:49:32 AM	Tube furnace set to 0
8/28/2011	11:50:02 AM	Helium valve closed
8/28/2011	11:50:02 AM	H2 valve closed
8/28/2011	11:50:02 AM	BCl3 valve closed
8/28/2011	11:50:02 AM	PH3 valve closed
8/28/2011	11:50:02 AM	SiCl4 pre valve closed
8/28/2011	11:50:02 AM	SiCl4 post valve closed
8/28/2011	11:50:02 AM	Bypass valve closed
8/28/2011	11:50:02 AM	Bubbler valve closed
8/28/2011	11:50:02 AM	Main Vac valve opened
8/28/2011	11:50:02 AM	Helium MFC set to  0.000000
8/28/2011	11:50:02 AM	H2 MFC set to  0.000000
8/28/2011	11:50:02 AM	BCl3 MFC set to  0.000000
8/28/2011	11:50:02 AM	PHl3 MFC set to  0.000000
8/28/2011	11:50:02 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:50:02 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:50:02 AM	Tube furnace set to 0
8/28/2011	11:50:32 AM	H2 valve closed
8/28/2011	11:50:32 AM	BCl3 valve closed
8/28/2011	11:50:32 AM	PH3 valve closed
8/28/2011	11:50:32 AM	SiCl4 pre valve closed
8/28/2011	11:50:32 AM	SiCl4 post valve closed
8/28/2011	11:50:32 AM	Bypass valve closed
8/28/2011	11:50:32 AM	Bubbler valve closed
8/28/2011	11:50:32 AM	Helium valve opened
8/28/2011	11:50:32 AM	Main Vac valve opened
8/28/2011	11:50:32 AM	Helium MFC set to  20.000000
8/28/2011	11:50:32 AM	H2 MFC set to  0.000000
8/28/2011	11:50:32 AM	BCl3 MFC set to  0.000000
8/28/2011	11:50:32 AM	PHl3 MFC set to  0.000000
8/28/2011	11:50:32 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:50:32 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:50:32 AM	Tube furnace set to 0
8/28/2011	11:51:02 AM	Helium valve closed
8/28/2011	11:51:02 AM	H2 valve closed
8/28/2011	11:51:02 AM	BCl3 valve closed
8/28/2011	11:51:02 AM	PH3 valve closed
8/28/2011	11:51:02 AM	SiCl4 pre valve closed
8/28/2011	11:51:02 AM	SiCl4 post valve closed
8/28/2011	11:51:02 AM	Bypass valve closed
8/28/2011	11:51:02 AM	Bubbler valve closed
8/28/2011	11:51:02 AM	Main Vac valve opened
8/28/2011	11:51:02 AM	Helium MFC set to  0.000000
8/28/2011	11:51:02 AM	H2 MFC set to  0.000000
8/28/2011	11:51:02 AM	BCl3 MFC set to  0.000000
8/28/2011	11:51:02 AM	PHl3 MFC set to  0.000000
8/28/2011	11:51:02 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:51:02 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:51:02 AM	Tube furnace set to 0
8/28/2011	11:51:32 AM	H2 valve closed
8/28/2011	11:51:32 AM	BCl3 valve closed
8/28/2011	11:51:32 AM	PH3 valve closed
8/28/2011	11:51:32 AM	SiCl4 pre valve closed
8/28/2011	11:51:32 AM	SiCl4 post valve closed
8/28/2011	11:51:32 AM	Bypass valve closed
8/28/2011	11:51:32 AM	Bubbler valve closed
8/28/2011	11:51:32 AM	Helium valve opened
8/28/2011	11:51:32 AM	Main Vac valve opened
8/28/2011	11:51:32 AM	Helium MFC set to  20.000000
8/28/2011	11:51:32 AM	H2 MFC set to  0.000000
8/28/2011	11:51:32 AM	BCl3 MFC set to  0.000000
8/28/2011	11:51:32 AM	PHl3 MFC set to  0.000000
8/28/2011	11:51:32 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:51:32 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:51:32 AM	Tube furnace set to 0
8/28/2011	11:52:02 AM	Helium valve closed
8/28/2011	11:52:02 AM	H2 valve closed
8/28/2011	11:52:02 AM	BCl3 valve closed
8/28/2011	11:52:02 AM	PH3 valve closed
8/28/2011	11:52:02 AM	SiCl4 pre valve closed
8/28/2011	11:52:02 AM	SiCl4 post valve closed
8/28/2011	11:52:02 AM	Bypass valve closed
8/28/2011	11:52:02 AM	Bubbler valve closed
8/28/2011	11:52:02 AM	Main Vac valve opened
8/28/2011	11:52:02 AM	Helium MFC set to  0.000000
8/28/2011	11:52:03 AM	H2 MFC set to  0.000000
8/28/2011	11:52:03 AM	BCl3 MFC set to  0.000000
8/28/2011	11:52:03 AM	PHl3 MFC set to  0.000000
8/28/2011	11:52:03 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:52:03 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:52:03 AM	Tube furnace set to 0
8/28/2011	11:52:33 AM	H2 valve closed
8/28/2011	11:52:33 AM	BCl3 valve closed
8/28/2011	11:52:33 AM	PH3 valve closed
8/28/2011	11:52:33 AM	SiCl4 pre valve closed
8/28/2011	11:52:33 AM	SiCl4 post valve closed
8/28/2011	11:52:33 AM	Bypass valve closed
8/28/2011	11:52:33 AM	Bubbler valve closed
8/28/2011	11:52:33 AM	Helium valve opened
8/28/2011	11:52:33 AM	Main Vac valve opened
8/28/2011	11:52:33 AM	Helium MFC set to  20.000000
8/28/2011	11:52:33 AM	H2 MFC set to  0.000000
8/28/2011	11:52:33 AM	BCl3 MFC set to  0.000000
8/28/2011	11:52:33 AM	PHl3 MFC set to  0.000000
8/28/2011	11:52:33 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:52:33 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:52:33 AM	Tube furnace set to 0
8/28/2011	11:53:03 AM	Helium valve closed
8/28/2011	11:53:03 AM	H2 valve closed
8/28/2011	11:53:03 AM	BCl3 valve closed
8/28/2011	11:53:03 AM	PH3 valve closed
8/28/2011	11:53:03 AM	SiCl4 pre valve closed
8/28/2011	11:53:03 AM	SiCl4 post valve closed
8/28/2011	11:53:03 AM	Bypass valve closed
8/28/2011	11:53:03 AM	Bubbler valve closed
8/28/2011	11:53:03 AM	Main Vac valve opened
8/28/2011	11:53:03 AM	Helium MFC set to  0.000000
8/28/2011	11:53:03 AM	H2 MFC set to  0.000000
8/28/2011	11:53:03 AM	BCl3 MFC set to  0.000000
8/28/2011	11:53:03 AM	PHl3 MFC set to  0.000000
8/28/2011	11:53:03 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:53:03 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:53:03 AM	Tube furnace set to 0
8/28/2011	11:53:33 AM	H2 valve closed
8/28/2011	11:53:33 AM	BCl3 valve closed
8/28/2011	11:53:33 AM	PH3 valve closed
8/28/2011	11:53:33 AM	SiCl4 pre valve closed
8/28/2011	11:53:33 AM	SiCl4 post valve closed
8/28/2011	11:53:33 AM	Bypass valve closed
8/28/2011	11:53:33 AM	Bubbler valve closed
8/28/2011	11:53:33 AM	Helium valve opened
8/28/2011	11:53:33 AM	Main Vac valve opened
8/28/2011	11:53:33 AM	Helium MFC set to  20.000000
8/28/2011	11:53:33 AM	H2 MFC set to  0.000000
8/28/2011	11:53:33 AM	BCl3 MFC set to  0.000000
8/28/2011	11:53:33 AM	PHl3 MFC set to  0.000000
8/28/2011	11:53:33 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:53:33 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:53:33 AM	Tube furnace set to 0
8/28/2011	11:54:03 AM	Helium valve closed
8/28/2011	11:54:03 AM	H2 valve closed
8/28/2011	11:54:03 AM	BCl3 valve closed
8/28/2011	11:54:03 AM	PH3 valve closed
8/28/2011	11:54:03 AM	SiCl4 pre valve closed
8/28/2011	11:54:03 AM	SiCl4 post valve closed
8/28/2011	11:54:03 AM	Bypass valve closed
8/28/2011	11:54:03 AM	Bubbler valve closed
8/28/2011	11:54:03 AM	Main Vac valve opened
8/28/2011	11:54:03 AM	Helium MFC set to  0.000000
8/28/2011	11:54:03 AM	H2 MFC set to  0.000000
8/28/2011	11:54:03 AM	BCl3 MFC set to  0.000000
8/28/2011	11:54:03 AM	PHl3 MFC set to  0.000000
8/28/2011	11:54:03 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:54:03 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:54:03 AM	Tube furnace set to 0
8/28/2011	11:54:33 AM	H2 valve closed
8/28/2011	11:54:33 AM	BCl3 valve closed
8/28/2011	11:54:33 AM	PH3 valve closed
8/28/2011	11:54:33 AM	SiCl4 pre valve closed
8/28/2011	11:54:33 AM	SiCl4 post valve closed
8/28/2011	11:54:33 AM	Bypass valve closed
8/28/2011	11:54:33 AM	Bubbler valve closed
8/28/2011	11:54:33 AM	Helium valve opened
8/28/2011	11:54:33 AM	Main Vac valve opened
8/28/2011	11:54:33 AM	Helium MFC set to  20.000000
8/28/2011	11:54:33 AM	H2 MFC set to  0.000000
8/28/2011	11:54:33 AM	BCl3 MFC set to  0.000000
8/28/2011	11:54:33 AM	PHl3 MFC set to  0.000000
8/28/2011	11:54:33 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:54:33 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:54:34 AM	Tube furnace set to 0
8/28/2011	11:55:04 AM	Helium valve closed
8/28/2011	11:55:04 AM	H2 valve closed
8/28/2011	11:55:04 AM	BCl3 valve closed
8/28/2011	11:55:04 AM	PH3 valve closed
8/28/2011	11:55:04 AM	SiCl4 pre valve closed
8/28/2011	11:55:04 AM	SiCl4 post valve closed
8/28/2011	11:55:04 AM	Bypass valve closed
8/28/2011	11:55:04 AM	Bubbler valve closed
8/28/2011	11:55:04 AM	Main Vac valve opened
8/28/2011	11:55:04 AM	Helium MFC set to  0.000000
8/28/2011	11:55:04 AM	H2 MFC set to  0.000000
8/28/2011	11:55:04 AM	BCl3 MFC set to  0.000000
8/28/2011	11:55:04 AM	PHl3 MFC set to  0.000000
8/28/2011	11:55:04 AM	SiCl4 MFC set to  0.000000
8/28/2011	11:55:04 AM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:55:04 AM	Tube furnace set to 0
8/28/2011	11:55:05 AM	Run finished at 11:55 AM
8/28/2011	11:55:05 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/28/2011	12:39:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/28/2011	12:39:56 PM	Recipe started at 12:39 PM
8/28/2011	12:39:56 PM	Helium valve closed
8/28/2011	12:39:56 PM	H2 valve closed
8/28/2011	12:39:56 PM	BCl3 valve closed
8/28/2011	12:39:56 PM	PH3 valve closed
8/28/2011	12:39:56 PM	SiCl4 pre valve closed
8/28/2011	12:39:56 PM	SiCl4 post valve closed
8/28/2011	12:39:56 PM	Main Vac valve closed
8/28/2011	12:39:56 PM	Bypass valve closed
8/28/2011	12:39:56 PM	Bubbler valve closed
8/28/2011	12:39:56 PM	Helium MFC set to  0.000000
8/28/2011	12:39:56 PM	H2 MFC set to  0.000000
8/28/2011	12:39:56 PM	BCl3 MFC set to  0.000000
8/28/2011	12:39:56 PM	PHl3 MFC set to  0.000000
8/28/2011	12:39:56 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:39:56 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:39:57 PM	Tube furnace set to 0
8/28/2011	12:39:57 PM	Run finished at 12:39 PM
8/28/2011	12:39:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/28/2011	12:40:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/28/2011	12:40:18 PM	Recipe started at 12:40 PM
8/28/2011	12:40:18 PM	Helium valve closed
8/28/2011	12:40:18 PM	H2 valve closed
8/28/2011	12:40:18 PM	BCl3 valve closed
8/28/2011	12:40:18 PM	PH3 valve closed
8/28/2011	12:40:18 PM	SiCl4 pre valve closed
8/28/2011	12:40:18 PM	SiCl4 post valve closed
8/28/2011	12:40:18 PM	Main Vac valve closed
8/28/2011	12:40:18 PM	Bubbler valve closed
8/28/2011	12:40:18 PM	Bypass valve opened
8/28/2011	12:40:18 PM	Helium MFC set to  0.000000
8/28/2011	12:40:18 PM	H2 MFC set to  0.000000
8/28/2011	12:40:18 PM	BCl3 MFC set to  0.000000
8/28/2011	12:40:18 PM	PHl3 MFC set to  0.000000
8/28/2011	12:40:18 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:40:18 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:40:18 PM	Tube furnace set to 0
8/28/2011	12:40:18 PM	Helium valve closed
8/28/2011	12:40:18 PM	H2 valve closed
8/28/2011	12:40:18 PM	BCl3 valve closed
8/28/2011	12:40:18 PM	PH3 valve closed
8/28/2011	12:40:18 PM	SiCl4 pre valve closed
8/28/2011	12:40:18 PM	SiCl4 post valve closed
8/28/2011	12:40:18 PM	Main Vac valve closed
8/28/2011	12:40:18 PM	Bubbler valve closed
8/28/2011	12:40:18 PM	Bypass valve opened
8/28/2011	12:40:18 PM	Helium MFC set to  0.000000
8/28/2011	12:40:18 PM	H2 MFC set to  0.000000
8/28/2011	12:40:18 PM	BCl3 MFC set to  0.000000
8/28/2011	12:40:18 PM	PHl3 MFC set to  0.000000
8/28/2011	12:40:18 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:40:18 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:40:18 PM	Tube furnace set to 0
8/28/2011	12:40:20 PM	Helium valve closed
8/28/2011	12:40:20 PM	H2 valve closed
8/28/2011	12:40:20 PM	BCl3 valve closed
8/28/2011	12:40:20 PM	PH3 valve closed
8/28/2011	12:40:20 PM	SiCl4 pre valve closed
8/28/2011	12:40:20 PM	SiCl4 post valve closed
8/28/2011	12:40:20 PM	Bypass valve closed
8/28/2011	12:40:20 PM	Bubbler valve closed
8/28/2011	12:40:20 PM	Main Vac valve opened
8/28/2011	12:40:20 PM	Helium MFC set to  0.000000
8/28/2011	12:40:20 PM	H2 MFC set to  0.000000
8/28/2011	12:40:20 PM	BCl3 MFC set to  0.000000
8/28/2011	12:40:20 PM	PHl3 MFC set to  0.000000
8/28/2011	12:40:20 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:40:20 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:40:20 PM	Tube furnace set to 0
8/28/2011	12:40:50 PM	H2 valve closed
8/28/2011	12:40:50 PM	BCl3 valve closed
8/28/2011	12:40:50 PM	PH3 valve closed
8/28/2011	12:40:50 PM	SiCl4 pre valve closed
8/28/2011	12:40:50 PM	SiCl4 post valve closed
8/28/2011	12:40:50 PM	Bypass valve closed
8/28/2011	12:40:50 PM	Bubbler valve closed
8/28/2011	12:40:50 PM	Helium valve opened
8/28/2011	12:40:50 PM	Main Vac valve opened
8/28/2011	12:40:50 PM	Helium MFC set to  20.000000
8/28/2011	12:40:50 PM	H2 MFC set to  0.000000
8/28/2011	12:40:50 PM	BCl3 MFC set to  0.000000
8/28/2011	12:40:50 PM	PHl3 MFC set to  0.000000
8/28/2011	12:40:50 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:40:50 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:40:50 PM	Tube furnace set to 0
8/28/2011	12:41:20 PM	Helium valve closed
8/28/2011	12:41:20 PM	H2 valve closed
8/28/2011	12:41:20 PM	BCl3 valve closed
8/28/2011	12:41:20 PM	PH3 valve closed
8/28/2011	12:41:20 PM	SiCl4 pre valve closed
8/28/2011	12:41:20 PM	SiCl4 post valve closed
8/28/2011	12:41:20 PM	Bypass valve closed
8/28/2011	12:41:20 PM	Bubbler valve closed
8/28/2011	12:41:20 PM	Main Vac valve opened
8/28/2011	12:41:20 PM	Helium MFC set to  0.000000
8/28/2011	12:41:20 PM	H2 MFC set to  0.000000
8/28/2011	12:41:20 PM	BCl3 MFC set to  0.000000
8/28/2011	12:41:20 PM	PHl3 MFC set to  0.000000
8/28/2011	12:41:20 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:41:20 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:41:20 PM	Tube furnace set to 0
8/28/2011	12:41:50 PM	H2 valve closed
8/28/2011	12:41:50 PM	BCl3 valve closed
8/28/2011	12:41:50 PM	PH3 valve closed
8/28/2011	12:41:50 PM	SiCl4 pre valve closed
8/28/2011	12:41:50 PM	SiCl4 post valve closed
8/28/2011	12:41:50 PM	Bypass valve closed
8/28/2011	12:41:50 PM	Bubbler valve closed
8/28/2011	12:41:50 PM	Helium valve opened
8/28/2011	12:41:50 PM	Main Vac valve opened
8/28/2011	12:41:50 PM	Helium MFC set to  20.000000
8/28/2011	12:41:50 PM	H2 MFC set to  0.000000
8/28/2011	12:41:50 PM	BCl3 MFC set to  0.000000
8/28/2011	12:41:50 PM	PHl3 MFC set to  0.000000
8/28/2011	12:41:50 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:41:50 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:41:51 PM	Tube furnace set to 0
8/28/2011	12:42:21 PM	Helium valve closed
8/28/2011	12:42:21 PM	H2 valve closed
8/28/2011	12:42:21 PM	BCl3 valve closed
8/28/2011	12:42:21 PM	PH3 valve closed
8/28/2011	12:42:21 PM	SiCl4 pre valve closed
8/28/2011	12:42:21 PM	SiCl4 post valve closed
8/28/2011	12:42:21 PM	Bypass valve closed
8/28/2011	12:42:21 PM	Bubbler valve closed
8/28/2011	12:42:21 PM	Main Vac valve opened
8/28/2011	12:42:21 PM	Helium MFC set to  0.000000
8/28/2011	12:42:21 PM	H2 MFC set to  0.000000
8/28/2011	12:42:21 PM	BCl3 MFC set to  0.000000
8/28/2011	12:42:21 PM	PHl3 MFC set to  0.000000
8/28/2011	12:42:21 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:42:21 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:42:21 PM	Tube furnace set to 0
8/28/2011	12:42:51 PM	H2 valve closed
8/28/2011	12:42:51 PM	BCl3 valve closed
8/28/2011	12:42:51 PM	PH3 valve closed
8/28/2011	12:42:51 PM	SiCl4 pre valve closed
8/28/2011	12:42:51 PM	SiCl4 post valve closed
8/28/2011	12:42:51 PM	Bypass valve closed
8/28/2011	12:42:51 PM	Bubbler valve closed
8/28/2011	12:42:51 PM	Helium valve opened
8/28/2011	12:42:51 PM	Main Vac valve opened
8/28/2011	12:42:51 PM	Helium MFC set to  20.000000
8/28/2011	12:42:51 PM	H2 MFC set to  0.000000
8/28/2011	12:42:51 PM	BCl3 MFC set to  0.000000
8/28/2011	12:42:51 PM	PHl3 MFC set to  0.000000
8/28/2011	12:42:51 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:42:51 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:42:51 PM	Tube furnace set to 0
8/28/2011	12:43:21 PM	Helium valve closed
8/28/2011	12:43:21 PM	H2 valve closed
8/28/2011	12:43:21 PM	BCl3 valve closed
8/28/2011	12:43:21 PM	PH3 valve closed
8/28/2011	12:43:21 PM	SiCl4 pre valve closed
8/28/2011	12:43:21 PM	SiCl4 post valve closed
8/28/2011	12:43:21 PM	Bypass valve closed
8/28/2011	12:43:21 PM	Bubbler valve closed
8/28/2011	12:43:21 PM	Main Vac valve opened
8/28/2011	12:43:21 PM	Helium MFC set to  0.000000
8/28/2011	12:43:21 PM	H2 MFC set to  0.000000
8/28/2011	12:43:21 PM	BCl3 MFC set to  0.000000
8/28/2011	12:43:21 PM	PHl3 MFC set to  0.000000
8/28/2011	12:43:21 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:43:21 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:43:21 PM	Tube furnace set to 0
8/28/2011	12:43:51 PM	H2 valve closed
8/28/2011	12:43:51 PM	BCl3 valve closed
8/28/2011	12:43:51 PM	PH3 valve closed
8/28/2011	12:43:51 PM	SiCl4 pre valve closed
8/28/2011	12:43:51 PM	SiCl4 post valve closed
8/28/2011	12:43:51 PM	Bypass valve closed
8/28/2011	12:43:51 PM	Bubbler valve closed
8/28/2011	12:43:51 PM	Helium valve opened
8/28/2011	12:43:51 PM	Main Vac valve opened
8/28/2011	12:43:51 PM	Helium MFC set to  20.000000
8/28/2011	12:43:51 PM	H2 MFC set to  0.000000
8/28/2011	12:43:51 PM	BCl3 MFC set to  0.000000
8/28/2011	12:43:51 PM	PHl3 MFC set to  0.000000
8/28/2011	12:43:51 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:43:51 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:43:51 PM	Tube furnace set to 0
8/28/2011	12:44:21 PM	Helium valve closed
8/28/2011	12:44:21 PM	H2 valve closed
8/28/2011	12:44:21 PM	BCl3 valve closed
8/28/2011	12:44:21 PM	PH3 valve closed
8/28/2011	12:44:21 PM	SiCl4 pre valve closed
8/28/2011	12:44:21 PM	SiCl4 post valve closed
8/28/2011	12:44:21 PM	Bypass valve closed
8/28/2011	12:44:21 PM	Bubbler valve closed
8/28/2011	12:44:21 PM	Main Vac valve opened
8/28/2011	12:44:21 PM	Helium MFC set to  0.000000
8/28/2011	12:44:21 PM	H2 MFC set to  0.000000
8/28/2011	12:44:21 PM	BCl3 MFC set to  0.000000
8/28/2011	12:44:21 PM	PHl3 MFC set to  0.000000
8/28/2011	12:44:21 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:44:21 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:44:22 PM	Tube furnace set to 0
8/28/2011	12:44:52 PM	H2 valve closed
8/28/2011	12:44:52 PM	BCl3 valve closed
8/28/2011	12:44:52 PM	PH3 valve closed
8/28/2011	12:44:52 PM	SiCl4 pre valve closed
8/28/2011	12:44:52 PM	SiCl4 post valve closed
8/28/2011	12:44:52 PM	Bypass valve closed
8/28/2011	12:44:52 PM	Bubbler valve closed
8/28/2011	12:44:52 PM	Helium valve opened
8/28/2011	12:44:52 PM	Main Vac valve opened
8/28/2011	12:44:52 PM	Helium MFC set to  20.000000
8/28/2011	12:44:52 PM	H2 MFC set to  0.000000
8/28/2011	12:44:52 PM	BCl3 MFC set to  0.000000
8/28/2011	12:44:52 PM	PHl3 MFC set to  0.000000
8/28/2011	12:44:52 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:44:52 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:44:52 PM	Tube furnace set to 0
8/28/2011	12:45:22 PM	Helium valve closed
8/28/2011	12:45:22 PM	H2 valve closed
8/28/2011	12:45:22 PM	BCl3 valve closed
8/28/2011	12:45:22 PM	PH3 valve closed
8/28/2011	12:45:22 PM	SiCl4 pre valve closed
8/28/2011	12:45:22 PM	SiCl4 post valve closed
8/28/2011	12:45:22 PM	Bypass valve closed
8/28/2011	12:45:22 PM	Bubbler valve closed
8/28/2011	12:45:22 PM	Main Vac valve opened
8/28/2011	12:45:22 PM	Helium MFC set to  0.000000
8/28/2011	12:45:22 PM	H2 MFC set to  0.000000
8/28/2011	12:45:22 PM	BCl3 MFC set to  0.000000
8/28/2011	12:45:22 PM	PHl3 MFC set to  0.000000
8/28/2011	12:45:22 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:45:22 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:45:22 PM	Tube furnace set to 0
8/28/2011	12:45:52 PM	H2 valve closed
8/28/2011	12:45:52 PM	BCl3 valve closed
8/28/2011	12:45:52 PM	PH3 valve closed
8/28/2011	12:45:52 PM	SiCl4 pre valve closed
8/28/2011	12:45:52 PM	SiCl4 post valve closed
8/28/2011	12:45:52 PM	Bypass valve closed
8/28/2011	12:45:52 PM	Bubbler valve closed
8/28/2011	12:45:52 PM	Helium valve opened
8/28/2011	12:45:52 PM	Main Vac valve opened
8/28/2011	12:45:52 PM	Helium MFC set to  20.000000
8/28/2011	12:45:52 PM	H2 MFC set to  0.000000
8/28/2011	12:45:52 PM	BCl3 MFC set to  0.000000
8/28/2011	12:45:52 PM	PHl3 MFC set to  0.000000
8/28/2011	12:45:52 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:45:52 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:45:52 PM	Tube furnace set to 0
8/28/2011	12:46:22 PM	Helium valve closed
8/28/2011	12:46:22 PM	H2 valve closed
8/28/2011	12:46:22 PM	BCl3 valve closed
8/28/2011	12:46:22 PM	PH3 valve closed
8/28/2011	12:46:22 PM	SiCl4 pre valve closed
8/28/2011	12:46:22 PM	SiCl4 post valve closed
8/28/2011	12:46:22 PM	Bypass valve closed
8/28/2011	12:46:22 PM	Bubbler valve closed
8/28/2011	12:46:22 PM	Main Vac valve opened
8/28/2011	12:46:22 PM	Helium MFC set to  0.000000
8/28/2011	12:46:22 PM	H2 MFC set to  0.000000
8/28/2011	12:46:22 PM	BCl3 MFC set to  0.000000
8/28/2011	12:46:22 PM	PHl3 MFC set to  0.000000
8/28/2011	12:46:22 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:46:22 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:46:22 PM	Tube furnace set to 0
8/28/2011	12:46:52 PM	H2 valve closed
8/28/2011	12:46:52 PM	BCl3 valve closed
8/28/2011	12:46:52 PM	PH3 valve closed
8/28/2011	12:46:52 PM	SiCl4 pre valve closed
8/28/2011	12:46:52 PM	SiCl4 post valve closed
8/28/2011	12:46:52 PM	Bypass valve closed
8/28/2011	12:46:52 PM	Bubbler valve closed
8/28/2011	12:46:52 PM	Helium valve opened
8/28/2011	12:46:52 PM	Main Vac valve opened
8/28/2011	12:46:52 PM	Helium MFC set to  20.000000
8/28/2011	12:46:52 PM	H2 MFC set to  0.000000
8/28/2011	12:46:52 PM	BCl3 MFC set to  0.000000
8/28/2011	12:46:52 PM	PHl3 MFC set to  0.000000
8/28/2011	12:46:52 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:46:52 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:46:53 PM	Tube furnace set to 0
8/28/2011	12:47:23 PM	Helium valve closed
8/28/2011	12:47:23 PM	H2 valve closed
8/28/2011	12:47:23 PM	BCl3 valve closed
8/28/2011	12:47:23 PM	PH3 valve closed
8/28/2011	12:47:23 PM	SiCl4 pre valve closed
8/28/2011	12:47:23 PM	SiCl4 post valve closed
8/28/2011	12:47:23 PM	Bypass valve closed
8/28/2011	12:47:23 PM	Bubbler valve closed
8/28/2011	12:47:23 PM	Main Vac valve opened
8/28/2011	12:47:23 PM	Helium MFC set to  0.000000
8/28/2011	12:47:23 PM	H2 MFC set to  0.000000
8/28/2011	12:47:23 PM	BCl3 MFC set to  0.000000
8/28/2011	12:47:23 PM	PHl3 MFC set to  0.000000
8/28/2011	12:47:23 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:47:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:47:23 PM	Tube furnace set to 0
8/28/2011	12:47:53 PM	H2 valve closed
8/28/2011	12:47:53 PM	BCl3 valve closed
8/28/2011	12:47:53 PM	PH3 valve closed
8/28/2011	12:47:53 PM	SiCl4 pre valve closed
8/28/2011	12:47:53 PM	SiCl4 post valve closed
8/28/2011	12:47:53 PM	Bypass valve closed
8/28/2011	12:47:53 PM	Bubbler valve closed
8/28/2011	12:47:53 PM	Helium valve opened
8/28/2011	12:47:53 PM	Main Vac valve opened
8/28/2011	12:47:53 PM	Helium MFC set to  20.000000
8/28/2011	12:47:53 PM	H2 MFC set to  0.000000
8/28/2011	12:47:53 PM	BCl3 MFC set to  0.000000
8/28/2011	12:47:53 PM	PHl3 MFC set to  0.000000
8/28/2011	12:47:53 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:47:53 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:47:53 PM	Tube furnace set to 0
8/28/2011	12:48:23 PM	Helium valve closed
8/28/2011	12:48:23 PM	H2 valve closed
8/28/2011	12:48:23 PM	BCl3 valve closed
8/28/2011	12:48:23 PM	PH3 valve closed
8/28/2011	12:48:23 PM	SiCl4 pre valve closed
8/28/2011	12:48:23 PM	SiCl4 post valve closed
8/28/2011	12:48:23 PM	Bypass valve closed
8/28/2011	12:48:23 PM	Bubbler valve closed
8/28/2011	12:48:23 PM	Main Vac valve opened
8/28/2011	12:48:23 PM	Helium MFC set to  0.000000
8/28/2011	12:48:23 PM	H2 MFC set to  0.000000
8/28/2011	12:48:23 PM	BCl3 MFC set to  0.000000
8/28/2011	12:48:23 PM	PHl3 MFC set to  0.000000
8/28/2011	12:48:23 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:48:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:48:23 PM	Tube furnace set to 0
8/28/2011	12:48:53 PM	H2 valve closed
8/28/2011	12:48:53 PM	BCl3 valve closed
8/28/2011	12:48:53 PM	PH3 valve closed
8/28/2011	12:48:53 PM	SiCl4 pre valve closed
8/28/2011	12:48:53 PM	SiCl4 post valve closed
8/28/2011	12:48:53 PM	Bypass valve closed
8/28/2011	12:48:53 PM	Bubbler valve closed
8/28/2011	12:48:53 PM	Helium valve opened
8/28/2011	12:48:53 PM	Main Vac valve opened
8/28/2011	12:48:53 PM	Helium MFC set to  20.000000
8/28/2011	12:48:53 PM	H2 MFC set to  0.000000
8/28/2011	12:48:53 PM	BCl3 MFC set to  0.000000
8/28/2011	12:48:53 PM	PHl3 MFC set to  0.000000
8/28/2011	12:48:53 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:48:53 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:48:53 PM	Tube furnace set to 0
8/28/2011	12:49:24 PM	Helium valve closed
8/28/2011	12:49:24 PM	H2 valve closed
8/28/2011	12:49:24 PM	BCl3 valve closed
8/28/2011	12:49:24 PM	PH3 valve closed
8/28/2011	12:49:24 PM	SiCl4 pre valve closed
8/28/2011	12:49:24 PM	SiCl4 post valve closed
8/28/2011	12:49:24 PM	Bypass valve closed
8/28/2011	12:49:24 PM	Bubbler valve closed
8/28/2011	12:49:24 PM	Main Vac valve opened
8/28/2011	12:49:24 PM	Helium MFC set to  0.000000
8/28/2011	12:49:24 PM	H2 MFC set to  0.000000
8/28/2011	12:49:24 PM	BCl3 MFC set to  0.000000
8/28/2011	12:49:24 PM	PHl3 MFC set to  0.000000
8/28/2011	12:49:24 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:49:24 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:49:24 PM	Tube furnace set to 0
8/28/2011	12:49:54 PM	H2 valve closed
8/28/2011	12:49:54 PM	BCl3 valve closed
8/28/2011	12:49:54 PM	PH3 valve closed
8/28/2011	12:49:54 PM	SiCl4 pre valve closed
8/28/2011	12:49:54 PM	SiCl4 post valve closed
8/28/2011	12:49:54 PM	Bypass valve closed
8/28/2011	12:49:54 PM	Bubbler valve closed
8/28/2011	12:49:54 PM	Helium valve opened
8/28/2011	12:49:54 PM	Main Vac valve opened
8/28/2011	12:49:54 PM	Helium MFC set to  20.000000
8/28/2011	12:49:54 PM	H2 MFC set to  0.000000
8/28/2011	12:49:54 PM	BCl3 MFC set to  0.000000
8/28/2011	12:49:54 PM	PHl3 MFC set to  0.000000
8/28/2011	12:49:54 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:49:54 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:49:54 PM	Tube furnace set to 0
8/28/2011	12:50:24 PM	Helium valve closed
8/28/2011	12:50:24 PM	H2 valve closed
8/28/2011	12:50:24 PM	BCl3 valve closed
8/28/2011	12:50:24 PM	PH3 valve closed
8/28/2011	12:50:24 PM	SiCl4 pre valve closed
8/28/2011	12:50:24 PM	SiCl4 post valve closed
8/28/2011	12:50:24 PM	Bypass valve closed
8/28/2011	12:50:24 PM	Bubbler valve closed
8/28/2011	12:50:24 PM	Main Vac valve opened
8/28/2011	12:50:24 PM	Helium MFC set to  0.000000
8/28/2011	12:50:24 PM	H2 MFC set to  0.000000
8/28/2011	12:50:24 PM	BCl3 MFC set to  0.000000
8/28/2011	12:50:24 PM	PHl3 MFC set to  0.000000
8/28/2011	12:50:24 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:50:24 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:50:24 PM	Tube furnace set to 0
8/28/2011	12:50:25 PM	Run finished at 12:50 PM
8/28/2011	12:50:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
8/28/2011	12:56:15 PM	Recipe started at 12:56 PM
8/28/2011	12:56:15 PM	Helium valve closed
8/28/2011	12:56:15 PM	H2 valve closed
8/28/2011	12:56:15 PM	BCl3 valve closed
8/28/2011	12:56:15 PM	PH3 valve closed
8/28/2011	12:56:15 PM	SiCl4 pre valve closed
8/28/2011	12:56:15 PM	SiCl4 post valve closed
8/28/2011	12:56:15 PM	Main Vac valve closed
8/28/2011	12:56:15 PM	Bypass valve closed
8/28/2011	12:56:15 PM	Bubbler valve closed
8/28/2011	12:56:15 PM	Helium MFC set to  0.000000
8/28/2011	12:56:15 PM	H2 MFC set to  0.000000
8/28/2011	12:56:15 PM	BCl3 MFC set to  0.000000
8/28/2011	12:56:15 PM	PHl3 MFC set to  0.000000
8/28/2011	12:56:15 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:56:15 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:56:15 PM	Tube furnace set to 0
8/28/2011	12:56:18 PM	Helium valve closed
8/28/2011	12:56:18 PM	BCl3 valve closed
8/28/2011	12:56:18 PM	PH3 valve closed
8/28/2011	12:56:18 PM	SiCl4 pre valve closed
8/28/2011	12:56:18 PM	SiCl4 post valve closed
8/28/2011	12:56:18 PM	Main Vac valve closed
8/28/2011	12:56:18 PM	Bypass valve closed
8/28/2011	12:56:18 PM	Bubbler valve closed
8/28/2011	12:56:18 PM	H2 valve opened
8/28/2011	12:56:18 PM	Helium MFC set to  0.000000
8/28/2011	12:56:18 PM	H2 MFC set to  500.000000
8/28/2011	12:56:18 PM	BCl3 MFC set to  0.000000
8/28/2011	12:56:18 PM	PHl3 MFC set to  0.000000
8/28/2011	12:56:18 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:56:18 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:56:19 PM	Tube furnace set to 0
8/28/2011	12:57:25 PM	Helium valve closed
8/28/2011	12:57:25 PM	BCl3 valve closed
8/28/2011	12:57:25 PM	PH3 valve closed
8/28/2011	12:57:25 PM	SiCl4 pre valve closed
8/28/2011	12:57:25 PM	SiCl4 post valve closed
8/28/2011	12:57:25 PM	Main Vac valve closed
8/28/2011	12:57:25 PM	Bypass valve closed
8/28/2011	12:57:25 PM	H2 valve opened
8/28/2011	12:57:25 PM	Bubbler valve opened
8/28/2011	12:57:25 PM	Helium MFC set to  0.000000
8/28/2011	12:57:25 PM	H2 MFC set to  500.000000
8/28/2011	12:57:25 PM	BCl3 MFC set to  0.000000
8/28/2011	12:57:25 PM	PHl3 MFC set to  0.000000
8/28/2011	12:57:25 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:57:25 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:57:25 PM	Tube furnace set to 0
8/28/2011	12:57:26 PM	Helium valve closed
8/28/2011	12:57:26 PM	BCl3 valve closed
8/28/2011	12:57:26 PM	PH3 valve closed
8/28/2011	12:57:26 PM	SiCl4 pre valve closed
8/28/2011	12:57:26 PM	SiCl4 post valve closed
8/28/2011	12:57:26 PM	Main Vac valve closed
8/28/2011	12:57:26 PM	Bypass valve closed
8/28/2011	12:57:26 PM	H2 valve opened
8/28/2011	12:57:26 PM	Bubbler valve opened
8/28/2011	12:57:26 PM	Helium MFC set to  0.000000
8/28/2011	12:57:26 PM	H2 MFC set to  500.000000
8/28/2011	12:57:26 PM	BCl3 MFC set to  0.000000
8/28/2011	12:57:26 PM	PHl3 MFC set to  0.000000
8/28/2011	12:57:26 PM	SiCl4 MFC set to  0.000000
8/28/2011	12:57:26 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	12:57:26 PM	Tube furnace set to 1000
8/28/2011	1:17:26 PM	Helium valve closed
8/28/2011	1:17:26 PM	BCl3 valve closed
8/28/2011	1:17:26 PM	PH3 valve closed
8/28/2011	1:17:26 PM	Main Vac valve closed
8/28/2011	1:17:26 PM	Bypass valve closed
8/28/2011	1:17:26 PM	H2 valve opened
8/28/2011	1:17:26 PM	SiCl4 pre valve opened
8/28/2011	1:17:26 PM	SiCl4 post valve opened
8/28/2011	1:17:26 PM	Bubbler valve opened
8/28/2011	1:17:26 PM	Helium MFC set to  0.000000
8/28/2011	1:17:26 PM	H2 MFC set to  500.000000
8/28/2011	1:17:26 PM	BCl3 MFC set to  0.000000
8/28/2011	1:17:26 PM	PHl3 MFC set to  0.000000
8/28/2011	1:17:26 PM	SiCl4 MFC set to  50.000000
8/28/2011	1:17:26 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	1:17:27 PM	Tube furnace set to 1000
8/28/2011	1:37:27 PM	Helium valve closed
8/28/2011	1:37:27 PM	BCl3 valve closed
8/28/2011	1:37:27 PM	PH3 valve closed
8/28/2011	1:37:27 PM	SiCl4 pre valve closed
8/28/2011	1:37:27 PM	SiCl4 post valve closed
8/28/2011	1:37:27 PM	Main Vac valve closed
8/28/2011	1:37:27 PM	Bypass valve closed
8/28/2011	1:37:27 PM	H2 valve opened
8/28/2011	1:37:27 PM	Bubbler valve opened
8/28/2011	1:37:27 PM	Helium MFC set to  0.000000
8/28/2011	1:37:27 PM	H2 MFC set to  500.000000
8/28/2011	1:37:27 PM	BCl3 MFC set to  0.000000
8/28/2011	1:37:27 PM	PHl3 MFC set to  0.000000
8/28/2011	1:37:27 PM	SiCl4 MFC set to  0.000000
8/28/2011	1:37:27 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	1:37:27 PM	Tube furnace set to 950
8/28/2011	1:42:27 PM	Helium valve closed
8/28/2011	1:42:27 PM	BCl3 valve closed
8/28/2011	1:42:27 PM	PH3 valve closed
8/28/2011	1:42:27 PM	SiCl4 pre valve closed
8/28/2011	1:42:27 PM	SiCl4 post valve closed
8/28/2011	1:42:27 PM	Main Vac valve closed
8/28/2011	1:42:27 PM	Bypass valve closed
8/28/2011	1:42:27 PM	H2 valve opened
8/28/2011	1:42:27 PM	Bubbler valve opened
8/28/2011	1:42:27 PM	Helium MFC set to  0.000000
8/28/2011	1:42:27 PM	H2 MFC set to  500.000000
8/28/2011	1:42:27 PM	BCl3 MFC set to  0.000000
8/28/2011	1:42:27 PM	PHl3 MFC set to  0.000000
8/28/2011	1:42:27 PM	SiCl4 MFC set to  0.000000
8/28/2011	1:42:27 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	1:42:27 PM	Tube furnace set to 850
8/28/2011	1:47:27 PM	H2 valve closed
8/28/2011	1:47:27 PM	BCl3 valve closed
8/28/2011	1:47:27 PM	PH3 valve closed
8/28/2011	1:47:27 PM	SiCl4 pre valve closed
8/28/2011	1:47:27 PM	SiCl4 post valve closed
8/28/2011	1:47:27 PM	Main Vac valve closed
8/28/2011	1:47:27 PM	Bypass valve closed
8/28/2011	1:47:27 PM	Helium valve opened
8/28/2011	1:47:27 PM	Bubbler valve opened
8/28/2011	1:47:27 PM	Helium MFC set to  500.000000
8/28/2011	1:47:27 PM	H2 MFC set to  0.000000
8/28/2011	1:47:27 PM	BCl3 MFC set to  0.000000
8/28/2011	1:47:27 PM	PHl3 MFC set to  0.000000
8/28/2011	1:47:27 PM	SiCl4 MFC set to  0.000000
8/28/2011	1:47:27 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	1:47:27 PM	Tube furnace set to 0
8/28/2011	2:19:26 PM	Helium valve closed
8/28/2011	2:19:26 PM	H2 valve closed
8/28/2011	2:19:26 PM	BCl3 valve closed
8/28/2011	2:19:26 PM	PH3 valve closed
8/28/2011	2:19:26 PM	SiCl4 pre valve closed
8/28/2011	2:19:26 PM	SiCl4 post valve closed
8/28/2011	2:19:26 PM	Main Vac valve closed
8/28/2011	2:19:26 PM	Bypass valve closed
8/28/2011	2:19:26 PM	Bubbler valve closed
8/28/2011	2:19:26 PM	Helium MFC set to  0.000000
8/28/2011	2:19:26 PM	H2 MFC set to  0.000000
8/28/2011	2:19:26 PM	BCl3 MFC set to  0.000000
8/28/2011	2:19:26 PM	PHl3 MFC set to  0.000000
8/28/2011	2:19:26 PM	SiCl4 MFC set to  0.000000
8/28/2011	2:19:26 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	2:19:26 PM	Tube furnace set to 0
8/28/2011	2:19:27 PM	Run finished at 2:19 PM
8/28/2011	2:26:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	2:26:47 PM	Recipe started at 2:26 PM
8/28/2011	2:26:47 PM	Helium valve closed
8/28/2011	2:26:47 PM	H2 valve closed
8/28/2011	2:26:47 PM	BCl3 valve closed
8/28/2011	2:26:47 PM	PH3 valve closed
8/28/2011	2:26:47 PM	SiCl4 pre valve closed
8/28/2011	2:26:47 PM	SiCl4 post valve closed
8/28/2011	2:26:47 PM	Main Vac valve closed
8/28/2011	2:26:47 PM	Bubbler valve closed
8/28/2011	2:26:47 PM	Bypass valve opened
8/28/2011	2:26:47 PM	Helium MFC set to  0.000000
8/28/2011	2:26:47 PM	H2 MFC set to  0.000000
8/28/2011	2:26:47 PM	BCl3 MFC set to  0.000000
8/28/2011	2:26:47 PM	PHl3 MFC set to  0.000000
8/28/2011	2:26:47 PM	SiCl4 MFC set to  0.000000
8/28/2011	2:26:47 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	2:26:47 PM	Tube furnace set to 0
8/28/2011	2:27:57 PM	Helium valve closed
8/28/2011	2:27:57 PM	H2 valve closed
8/28/2011	2:27:57 PM	BCl3 valve closed
8/28/2011	2:27:57 PM	PH3 valve closed
8/28/2011	2:27:57 PM	SiCl4 pre valve closed
8/28/2011	2:27:57 PM	SiCl4 post valve closed
8/28/2011	2:27:57 PM	Main Vac valve closed
8/28/2011	2:27:57 PM	Bubbler valve closed
8/28/2011	2:27:57 PM	Bypass valve opened
8/28/2011	2:27:57 PM	Helium MFC set to  0.000000
8/28/2011	2:27:57 PM	H2 MFC set to  0.000000
8/28/2011	2:27:57 PM	BCl3 MFC set to  0.000000
8/28/2011	2:27:57 PM	PHl3 MFC set to  0.000000
8/28/2011	2:27:57 PM	SiCl4 MFC set to  0.000000
8/28/2011	2:27:57 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	2:27:58 PM	Tube furnace set to 0
8/28/2011	2:28:15 PM	Helium valve closed
8/28/2011	2:28:15 PM	H2 valve closed
8/28/2011	2:28:15 PM	BCl3 valve closed
8/28/2011	2:28:15 PM	PH3 valve closed
8/28/2011	2:28:15 PM	SiCl4 pre valve closed
8/28/2011	2:28:15 PM	SiCl4 post valve closed
8/28/2011	2:28:15 PM	Bypass valve closed
8/28/2011	2:28:15 PM	Bubbler valve closed
8/28/2011	2:28:15 PM	Main Vac valve opened
8/28/2011	2:28:15 PM	Helium MFC set to  0.000000
8/28/2011	2:28:15 PM	H2 MFC set to  0.000000
8/28/2011	2:28:15 PM	BCl3 MFC set to  0.000000
8/28/2011	2:28:15 PM	PHl3 MFC set to  0.000000
8/28/2011	2:28:15 PM	SiCl4 MFC set to  0.000000
8/28/2011	2:28:15 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	2:28:15 PM	Tube furnace set to 0
8/28/2011	2:28:16 PM	Run finished at 2:28 PM
8/28/2011	2:28:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	3:26:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/28/2011	3:26:22 PM	Recipe started at 3:26 PM
8/28/2011	3:26:22 PM	Helium valve closed
8/28/2011	3:26:22 PM	H2 valve closed
8/28/2011	3:26:22 PM	BCl3 valve closed
8/28/2011	3:26:22 PM	PH3 valve closed
8/28/2011	3:26:22 PM	SiCl4 pre valve closed
8/28/2011	3:26:22 PM	SiCl4 post valve closed
8/28/2011	3:26:22 PM	Main Vac valve closed
8/28/2011	3:26:22 PM	Bypass valve closed
8/28/2011	3:26:22 PM	Bubbler valve closed
8/28/2011	3:26:22 PM	Helium MFC set to  0.000000
8/28/2011	3:26:22 PM	H2 MFC set to  0.000000
8/28/2011	3:26:22 PM	BCl3 MFC set to  0.000000
8/28/2011	3:26:22 PM	PHl3 MFC set to  0.000000
8/28/2011	3:26:22 PM	SiCl4 MFC set to  0.000000
8/28/2011	3:26:22 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	3:26:22 PM	Tube furnace set to 0
8/28/2011	3:26:22 PM	Run finished at 3:26 PM
8/28/2011	3:26:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
8/28/2011	3:26:33 PM	Main Vac valve opened
8/28/2011	3:27:46 PM	Recipe started at 3:27 PM
8/28/2011	3:27:46 PM	Helium valve closed
8/28/2011	3:27:46 PM	H2 valve closed
8/28/2011	3:27:46 PM	BCl3 valve closed
8/28/2011	3:27:46 PM	PH3 valve closed
8/28/2011	3:27:46 PM	SiCl4 pre valve closed
8/28/2011	3:27:46 PM	SiCl4 post valve closed
8/28/2011	3:27:46 PM	Main Vac valve closed
8/28/2011	3:27:46 PM	Bypass valve closed
8/28/2011	3:27:46 PM	Bubbler valve closed
8/28/2011	3:27:46 PM	Helium MFC set to  0.000000
8/28/2011	3:27:46 PM	H2 MFC set to  0.000000
8/28/2011	3:27:46 PM	BCl3 MFC set to  0.000000
8/28/2011	3:27:46 PM	PHl3 MFC set to  0.000000
8/28/2011	3:27:46 PM	SiCl4 MFC set to  0.000000
8/28/2011	3:27:46 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	3:27:46 PM	Tube furnace set to 0
8/28/2011	3:27:49 PM	Helium valve closed
8/28/2011	3:27:49 PM	BCl3 valve closed
8/28/2011	3:27:49 PM	PH3 valve closed
8/28/2011	3:27:49 PM	SiCl4 pre valve closed
8/28/2011	3:27:49 PM	SiCl4 post valve closed
8/28/2011	3:27:49 PM	Main Vac valve closed
8/28/2011	3:27:49 PM	Bypass valve closed
8/28/2011	3:27:49 PM	Bubbler valve closed
8/28/2011	3:27:49 PM	H2 valve opened
8/28/2011	3:27:49 PM	Helium MFC set to  0.000000
8/28/2011	3:27:49 PM	H2 MFC set to  500.000000
8/28/2011	3:27:49 PM	BCl3 MFC set to  0.000000
8/28/2011	3:27:49 PM	PHl3 MFC set to  0.000000
8/28/2011	3:27:49 PM	SiCl4 MFC set to  0.000000
8/28/2011	3:27:49 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	3:27:49 PM	Tube furnace set to 0
8/28/2011	3:28:55 PM	Helium valve closed
8/28/2011	3:28:55 PM	BCl3 valve closed
8/28/2011	3:28:55 PM	PH3 valve closed
8/28/2011	3:28:55 PM	SiCl4 pre valve closed
8/28/2011	3:28:55 PM	SiCl4 post valve closed
8/28/2011	3:28:55 PM	Main Vac valve closed
8/28/2011	3:28:55 PM	Bypass valve closed
8/28/2011	3:28:55 PM	H2 valve opened
8/28/2011	3:28:55 PM	Bubbler valve opened
8/28/2011	3:28:55 PM	Helium MFC set to  0.000000
8/28/2011	3:28:55 PM	H2 MFC set to  500.000000
8/28/2011	3:28:55 PM	BCl3 MFC set to  0.000000
8/28/2011	3:28:55 PM	PHl3 MFC set to  0.000000
8/28/2011	3:28:55 PM	SiCl4 MFC set to  0.000000
8/28/2011	3:28:55 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	3:28:55 PM	Tube furnace set to 0
8/28/2011	3:28:56 PM	Helium valve closed
8/28/2011	3:28:56 PM	BCl3 valve closed
8/28/2011	3:28:56 PM	PH3 valve closed
8/28/2011	3:28:56 PM	SiCl4 pre valve closed
8/28/2011	3:28:56 PM	SiCl4 post valve closed
8/28/2011	3:28:56 PM	Main Vac valve closed
8/28/2011	3:28:56 PM	Bypass valve closed
8/28/2011	3:28:56 PM	H2 valve opened
8/28/2011	3:28:56 PM	Bubbler valve opened
8/28/2011	3:28:56 PM	Helium MFC set to  0.000000
8/28/2011	3:28:56 PM	H2 MFC set to  500.000000
8/28/2011	3:28:56 PM	BCl3 MFC set to  0.000000
8/28/2011	3:28:56 PM	PHl3 MFC set to  0.000000
8/28/2011	3:28:56 PM	SiCl4 MFC set to  0.000000
8/28/2011	3:28:56 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	3:28:56 PM	Tube furnace set to 1000
8/28/2011	3:48:56 PM	Helium valve closed
8/28/2011	3:48:56 PM	BCl3 valve closed
8/28/2011	3:48:56 PM	PH3 valve closed
8/28/2011	3:48:56 PM	Main Vac valve closed
8/28/2011	3:48:56 PM	Bypass valve closed
8/28/2011	3:48:56 PM	H2 valve opened
8/28/2011	3:48:56 PM	SiCl4 pre valve opened
8/28/2011	3:48:56 PM	SiCl4 post valve opened
8/28/2011	3:48:56 PM	Bubbler valve opened
8/28/2011	3:48:56 PM	Helium MFC set to  0.000000
8/28/2011	3:48:56 PM	H2 MFC set to  500.000000
8/28/2011	3:48:56 PM	BCl3 MFC set to  0.000000
8/28/2011	3:48:56 PM	PHl3 MFC set to  0.000000
8/28/2011	3:48:56 PM	SiCl4 MFC set to  50.000000
8/28/2011	3:48:56 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	3:48:57 PM	Tube furnace set to 1000
8/28/2011	4:08:56 PM	Helium valve closed
8/28/2011	4:08:56 PM	BCl3 valve closed
8/28/2011	4:08:56 PM	PH3 valve closed
8/28/2011	4:08:56 PM	SiCl4 pre valve closed
8/28/2011	4:08:56 PM	SiCl4 post valve closed
8/28/2011	4:08:56 PM	Main Vac valve closed
8/28/2011	4:08:56 PM	Bypass valve closed
8/28/2011	4:08:56 PM	H2 valve opened
8/28/2011	4:08:56 PM	Bubbler valve opened
8/28/2011	4:08:56 PM	Helium MFC set to  0.000000
8/28/2011	4:08:56 PM	H2 MFC set to  500.000000
8/28/2011	4:08:56 PM	BCl3 MFC set to  0.000000
8/28/2011	4:08:56 PM	PHl3 MFC set to  0.000000
8/28/2011	4:08:56 PM	SiCl4 MFC set to  0.000000
8/28/2011	4:08:56 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	4:08:57 PM	Tube furnace set to 950
8/28/2011	4:13:57 PM	Helium valve closed
8/28/2011	4:13:57 PM	BCl3 valve closed
8/28/2011	4:13:57 PM	PH3 valve closed
8/28/2011	4:13:57 PM	SiCl4 pre valve closed
8/28/2011	4:13:57 PM	SiCl4 post valve closed
8/28/2011	4:13:57 PM	Main Vac valve closed
8/28/2011	4:13:57 PM	Bypass valve closed
8/28/2011	4:13:57 PM	H2 valve opened
8/28/2011	4:13:57 PM	Bubbler valve opened
8/28/2011	4:13:57 PM	Helium MFC set to  0.000000
8/28/2011	4:13:57 PM	H2 MFC set to  500.000000
8/28/2011	4:13:57 PM	BCl3 MFC set to  0.000000
8/28/2011	4:13:57 PM	PHl3 MFC set to  0.000000
8/28/2011	4:13:57 PM	SiCl4 MFC set to  0.000000
8/28/2011	4:13:57 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	4:13:57 PM	Tube furnace set to 850
8/28/2011	4:18:57 PM	H2 valve closed
8/28/2011	4:18:57 PM	BCl3 valve closed
8/28/2011	4:18:57 PM	PH3 valve closed
8/28/2011	4:18:57 PM	SiCl4 pre valve closed
8/28/2011	4:18:57 PM	SiCl4 post valve closed
8/28/2011	4:18:57 PM	Main Vac valve closed
8/28/2011	4:18:57 PM	Bypass valve closed
8/28/2011	4:18:57 PM	Helium valve opened
8/28/2011	4:18:57 PM	Bubbler valve opened
8/28/2011	4:18:57 PM	Helium MFC set to  500.000000
8/28/2011	4:18:57 PM	H2 MFC set to  0.000000
8/28/2011	4:18:57 PM	BCl3 MFC set to  0.000000
8/28/2011	4:18:57 PM	PHl3 MFC set to  0.000000
8/28/2011	4:18:57 PM	SiCl4 MFC set to  0.000000
8/28/2011	4:18:57 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	4:18:57 PM	Tube furnace set to 0
8/28/2011	4:56:58 PM	Helium valve closed
8/28/2011	4:56:58 PM	H2 valve closed
8/28/2011	4:56:58 PM	BCl3 valve closed
8/28/2011	4:56:58 PM	PH3 valve closed
8/28/2011	4:56:58 PM	SiCl4 pre valve closed
8/28/2011	4:56:58 PM	SiCl4 post valve closed
8/28/2011	4:56:58 PM	Main Vac valve closed
8/28/2011	4:56:58 PM	Bypass valve closed
8/28/2011	4:56:58 PM	Bubbler valve closed
8/28/2011	4:56:58 PM	Helium MFC set to  0.000000
8/28/2011	4:56:58 PM	H2 MFC set to  0.000000
8/28/2011	4:56:58 PM	BCl3 MFC set to  0.000000
8/28/2011	4:56:58 PM	PHl3 MFC set to  0.000000
8/28/2011	4:56:58 PM	SiCl4 MFC set to  0.000000
8/28/2011	4:56:58 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	4:56:59 PM	Tube furnace set to 0
8/28/2011	4:57:00 PM	Run finished at 4:57 PM
8/28/2011	4:58:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	4:58:58 PM	Recipe started at 4:58 PM
8/28/2011	4:58:58 PM	Helium valve closed
8/28/2011	4:58:58 PM	H2 valve closed
8/28/2011	4:58:58 PM	BCl3 valve closed
8/28/2011	4:58:58 PM	PH3 valve closed
8/28/2011	4:58:58 PM	SiCl4 pre valve closed
8/28/2011	4:58:58 PM	SiCl4 post valve closed
8/28/2011	4:58:58 PM	Main Vac valve closed
8/28/2011	4:58:58 PM	Bubbler valve closed
8/28/2011	4:58:58 PM	Bypass valve opened
8/28/2011	4:58:58 PM	Helium MFC set to  0.000000
8/28/2011	4:58:58 PM	H2 MFC set to  0.000000
8/28/2011	4:58:58 PM	BCl3 MFC set to  0.000000
8/28/2011	4:58:58 PM	PHl3 MFC set to  0.000000
8/28/2011	4:58:58 PM	SiCl4 MFC set to  0.000000
8/28/2011	4:58:58 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	4:58:58 PM	Tube furnace set to 0
8/28/2011	5:00:01 PM	Helium valve closed
8/28/2011	5:00:01 PM	H2 valve closed
8/28/2011	5:00:01 PM	BCl3 valve closed
8/28/2011	5:00:01 PM	PH3 valve closed
8/28/2011	5:00:01 PM	SiCl4 pre valve closed
8/28/2011	5:00:01 PM	SiCl4 post valve closed
8/28/2011	5:00:01 PM	Main Vac valve closed
8/28/2011	5:00:01 PM	Bubbler valve closed
8/28/2011	5:00:01 PM	Bypass valve opened
8/28/2011	5:00:01 PM	Helium MFC set to  0.000000
8/28/2011	5:00:01 PM	H2 MFC set to  0.000000
8/28/2011	5:00:01 PM	BCl3 MFC set to  0.000000
8/28/2011	5:00:01 PM	PHl3 MFC set to  0.000000
8/28/2011	5:00:01 PM	SiCl4 MFC set to  0.000000
8/28/2011	5:00:01 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	5:00:01 PM	Tube furnace set to 0
8/28/2011	5:00:17 PM	Helium valve closed
8/28/2011	5:00:17 PM	H2 valve closed
8/28/2011	5:00:17 PM	BCl3 valve closed
8/28/2011	5:00:17 PM	PH3 valve closed
8/28/2011	5:00:17 PM	SiCl4 pre valve closed
8/28/2011	5:00:17 PM	SiCl4 post valve closed
8/28/2011	5:00:17 PM	Bypass valve closed
8/28/2011	5:00:17 PM	Bubbler valve closed
8/28/2011	5:00:17 PM	Main Vac valve opened
8/28/2011	5:00:17 PM	Helium MFC set to  0.000000
8/28/2011	5:00:17 PM	H2 MFC set to  0.000000
8/28/2011	5:00:17 PM	BCl3 MFC set to  0.000000
8/28/2011	5:00:17 PM	PHl3 MFC set to  0.000000
8/28/2011	5:00:17 PM	SiCl4 MFC set to  0.000000
8/28/2011	5:00:17 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	5:00:17 PM	Tube furnace set to 0
8/28/2011	5:00:18 PM	Run finished at 5:00 PM
8/28/2011	5:00:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	8:26:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	8:26:37 PM	Recipe started at 8:26 PM
8/28/2011	8:26:37 PM	Helium valve closed
8/28/2011	8:26:37 PM	H2 valve closed
8/28/2011	8:26:37 PM	BCl3 valve closed
8/28/2011	8:26:37 PM	PH3 valve closed
8/28/2011	8:26:37 PM	SiCl4 pre valve closed
8/28/2011	8:26:37 PM	SiCl4 post valve closed
8/28/2011	8:26:37 PM	Main Vac valve closed
8/28/2011	8:26:37 PM	Bypass valve closed
8/28/2011	8:26:37 PM	Bubbler valve closed
8/28/2011	8:26:37 PM	Helium MFC set to  0.000000
8/28/2011	8:26:37 PM	H2 MFC set to  0.000000
8/28/2011	8:26:37 PM	BCl3 MFC set to  0.000000
8/28/2011	8:26:37 PM	PHl3 MFC set to  0.000000
8/28/2011	8:26:37 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:26:37 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:26:37 PM	Tube furnace set to 0
8/28/2011	8:26:40 PM	H2 valve closed
8/28/2011	8:26:40 PM	BCl3 valve closed
8/28/2011	8:26:40 PM	PH3 valve closed
8/28/2011	8:26:40 PM	SiCl4 pre valve closed
8/28/2011	8:26:40 PM	SiCl4 post valve closed
8/28/2011	8:26:40 PM	Main Vac valve closed
8/28/2011	8:26:40 PM	Bypass valve closed
8/28/2011	8:26:40 PM	Bubbler valve closed
8/28/2011	8:26:40 PM	Helium valve opened
8/28/2011	8:26:40 PM	Helium MFC set to  500.000000
8/28/2011	8:26:40 PM	H2 MFC set to  0.000000
8/28/2011	8:26:40 PM	BCl3 MFC set to  0.000000
8/28/2011	8:26:40 PM	PHl3 MFC set to  0.000000
8/28/2011	8:26:40 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:26:40 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:26:41 PM	Tube furnace set to 0
8/28/2011	8:27:45 PM	Helium valve closed
8/28/2011	8:27:45 PM	H2 valve closed
8/28/2011	8:27:45 PM	BCl3 valve closed
8/28/2011	8:27:45 PM	PH3 valve closed
8/28/2011	8:27:45 PM	SiCl4 pre valve closed
8/28/2011	8:27:45 PM	SiCl4 post valve closed
8/28/2011	8:27:45 PM	Main Vac valve closed
8/28/2011	8:27:45 PM	Bypass valve closed
8/28/2011	8:27:45 PM	Bubbler valve closed
8/28/2011	8:27:45 PM	Helium MFC set to  0.000000
8/28/2011	8:27:45 PM	H2 MFC set to  0.000000
8/28/2011	8:27:45 PM	BCl3 MFC set to  0.000000
8/28/2011	8:27:45 PM	PHl3 MFC set to  0.000000
8/28/2011	8:27:45 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:27:45 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:27:45 PM	Tube furnace set to 0
8/28/2011	8:27:46 PM	Run finished at 8:27 PM
8/28/2011	8:27:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
8/28/2011	8:31:08 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	8:31:09 PM	Recipe started at 8:31 PM
8/28/2011	8:31:09 PM	Helium valve closed
8/28/2011	8:31:09 PM	H2 valve closed
8/28/2011	8:31:09 PM	BCl3 valve closed
8/28/2011	8:31:09 PM	PH3 valve closed
8/28/2011	8:31:09 PM	SiCl4 pre valve closed
8/28/2011	8:31:09 PM	SiCl4 post valve closed
8/28/2011	8:31:09 PM	Main Vac valve closed
8/28/2011	8:31:09 PM	Bubbler valve closed
8/28/2011	8:31:09 PM	Bypass valve opened
8/28/2011	8:31:09 PM	Helium MFC set to  0.000000
8/28/2011	8:31:09 PM	H2 MFC set to  0.000000
8/28/2011	8:31:09 PM	BCl3 MFC set to  0.000000
8/28/2011	8:31:09 PM	PHl3 MFC set to  0.000000
8/28/2011	8:31:09 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:31:09 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:31:09 PM	Tube furnace set to 0
8/28/2011	8:32:15 PM	Helium valve closed
8/28/2011	8:32:15 PM	H2 valve closed
8/28/2011	8:32:15 PM	BCl3 valve closed
8/28/2011	8:32:15 PM	PH3 valve closed
8/28/2011	8:32:15 PM	SiCl4 pre valve closed
8/28/2011	8:32:15 PM	SiCl4 post valve closed
8/28/2011	8:32:15 PM	Main Vac valve closed
8/28/2011	8:32:15 PM	Bubbler valve closed
8/28/2011	8:32:15 PM	Bypass valve opened
8/28/2011	8:32:15 PM	Helium MFC set to  0.000000
8/28/2011	8:32:15 PM	H2 MFC set to  0.000000
8/28/2011	8:32:15 PM	BCl3 MFC set to  0.000000
8/28/2011	8:32:15 PM	PHl3 MFC set to  0.000000
8/28/2011	8:32:15 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:32:15 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:32:16 PM	Tube furnace set to 0
8/28/2011	8:33:16 PM	Helium valve closed
8/28/2011	8:33:16 PM	H2 valve closed
8/28/2011	8:33:16 PM	BCl3 valve closed
8/28/2011	8:33:16 PM	PH3 valve closed
8/28/2011	8:33:16 PM	SiCl4 pre valve closed
8/28/2011	8:33:16 PM	SiCl4 post valve closed
8/28/2011	8:33:16 PM	Bypass valve closed
8/28/2011	8:33:16 PM	Bubbler valve closed
8/28/2011	8:33:16 PM	Main Vac valve opened
8/28/2011	8:33:16 PM	Helium MFC set to  0.000000
8/28/2011	8:33:16 PM	H2 MFC set to  0.000000
8/28/2011	8:33:16 PM	BCl3 MFC set to  0.000000
8/28/2011	8:33:16 PM	PHl3 MFC set to  0.000000
8/28/2011	8:33:16 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:33:16 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:33:16 PM	Tube furnace set to 0
8/28/2011	8:33:17 PM	Run finished at 8:33 PM
8/28/2011	8:33:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
8/28/2011	8:33:51 PM	Tube furnace set to 200
8/28/2011	8:36:29 PM	Tube furnace set to 0
8/28/2011	8:39:05 PM	Main Vac valve closed
8/28/2011	8:39:25 PM	Main Vac valve opened
8/28/2011	8:40:31 PM	Recipe started at 8:40 PM
8/28/2011	8:40:31 PM	Helium valve closed
8/28/2011	8:40:31 PM	H2 valve closed
8/28/2011	8:40:31 PM	BCl3 valve closed
8/28/2011	8:40:31 PM	PH3 valve closed
8/28/2011	8:40:31 PM	SiCl4 pre valve closed
8/28/2011	8:40:31 PM	SiCl4 post valve closed
8/28/2011	8:40:31 PM	Bypass valve closed
8/28/2011	8:40:31 PM	Bubbler valve closed
8/28/2011	8:40:31 PM	Main Vac valve opened
8/28/2011	8:40:31 PM	Helium MFC set to  0.000000
8/28/2011	8:40:31 PM	H2 MFC set to  0.000000
8/28/2011	8:40:31 PM	BCl3 MFC set to  0.000000
8/28/2011	8:40:31 PM	PHl3 MFC set to  0.000000
8/28/2011	8:40:31 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:40:31 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:40:31 PM	Tube furnace set to 0
8/28/2011	8:41:01 PM	H2 valve closed
8/28/2011	8:41:01 PM	BCl3 valve closed
8/28/2011	8:41:01 PM	PH3 valve closed
8/28/2011	8:41:01 PM	SiCl4 pre valve closed
8/28/2011	8:41:01 PM	SiCl4 post valve closed
8/28/2011	8:41:01 PM	Bypass valve closed
8/28/2011	8:41:01 PM	Bubbler valve closed
8/28/2011	8:41:01 PM	Helium valve opened
8/28/2011	8:41:01 PM	Main Vac valve opened
8/28/2011	8:41:01 PM	Helium MFC set to  20.000000
8/28/2011	8:41:01 PM	H2 MFC set to  0.000000
8/28/2011	8:41:01 PM	BCl3 MFC set to  0.000000
8/28/2011	8:41:01 PM	PHl3 MFC set to  0.000000
8/28/2011	8:41:01 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:41:01 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:41:01 PM	Tube furnace set to 0
8/28/2011	8:41:31 PM	Helium valve closed
8/28/2011	8:41:31 PM	H2 valve closed
8/28/2011	8:41:31 PM	BCl3 valve closed
8/28/2011	8:41:31 PM	PH3 valve closed
8/28/2011	8:41:31 PM	SiCl4 pre valve closed
8/28/2011	8:41:31 PM	SiCl4 post valve closed
8/28/2011	8:41:31 PM	Bypass valve closed
8/28/2011	8:41:31 PM	Bubbler valve closed
8/28/2011	8:41:31 PM	Main Vac valve opened
8/28/2011	8:41:31 PM	Helium MFC set to  0.000000
8/28/2011	8:41:32 PM	H2 MFC set to  0.000000
8/28/2011	8:41:32 PM	BCl3 MFC set to  0.000000
8/28/2011	8:41:32 PM	PHl3 MFC set to  0.000000
8/28/2011	8:41:32 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:41:32 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:41:32 PM	Tube furnace set to 0
8/28/2011	8:42:02 PM	H2 valve closed
8/28/2011	8:42:02 PM	BCl3 valve closed
8/28/2011	8:42:02 PM	PH3 valve closed
8/28/2011	8:42:02 PM	SiCl4 pre valve closed
8/28/2011	8:42:02 PM	SiCl4 post valve closed
8/28/2011	8:42:02 PM	Bypass valve closed
8/28/2011	8:42:02 PM	Bubbler valve closed
8/28/2011	8:42:02 PM	Helium valve opened
8/28/2011	8:42:02 PM	Main Vac valve opened
8/28/2011	8:42:02 PM	Helium MFC set to  20.000000
8/28/2011	8:42:02 PM	H2 MFC set to  0.000000
8/28/2011	8:42:02 PM	BCl3 MFC set to  0.000000
8/28/2011	8:42:02 PM	PHl3 MFC set to  0.000000
8/28/2011	8:42:02 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:42:02 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:42:02 PM	Tube furnace set to 0
8/28/2011	8:42:32 PM	Helium valve closed
8/28/2011	8:42:32 PM	H2 valve closed
8/28/2011	8:42:32 PM	BCl3 valve closed
8/28/2011	8:42:32 PM	PH3 valve closed
8/28/2011	8:42:32 PM	SiCl4 pre valve closed
8/28/2011	8:42:32 PM	SiCl4 post valve closed
8/28/2011	8:42:32 PM	Bypass valve closed
8/28/2011	8:42:32 PM	Bubbler valve closed
8/28/2011	8:42:32 PM	Main Vac valve opened
8/28/2011	8:42:32 PM	Helium MFC set to  0.000000
8/28/2011	8:42:32 PM	H2 MFC set to  0.000000
8/28/2011	8:42:32 PM	BCl3 MFC set to  0.000000
8/28/2011	8:42:32 PM	PHl3 MFC set to  0.000000
8/28/2011	8:42:32 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:42:32 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:42:32 PM	Tube furnace set to 0
8/28/2011	8:43:02 PM	H2 valve closed
8/28/2011	8:43:02 PM	BCl3 valve closed
8/28/2011	8:43:02 PM	PH3 valve closed
8/28/2011	8:43:02 PM	SiCl4 pre valve closed
8/28/2011	8:43:02 PM	SiCl4 post valve closed
8/28/2011	8:43:02 PM	Bypass valve closed
8/28/2011	8:43:02 PM	Bubbler valve closed
8/28/2011	8:43:02 PM	Helium valve opened
8/28/2011	8:43:02 PM	Main Vac valve opened
8/28/2011	8:43:02 PM	Helium MFC set to  20.000000
8/28/2011	8:43:02 PM	H2 MFC set to  0.000000
8/28/2011	8:43:02 PM	BCl3 MFC set to  0.000000
8/28/2011	8:43:02 PM	PHl3 MFC set to  0.000000
8/28/2011	8:43:02 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:43:02 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:43:02 PM	Tube furnace set to 0
8/28/2011	8:43:32 PM	Helium valve closed
8/28/2011	8:43:32 PM	H2 valve closed
8/28/2011	8:43:32 PM	BCl3 valve closed
8/28/2011	8:43:32 PM	PH3 valve closed
8/28/2011	8:43:32 PM	SiCl4 pre valve closed
8/28/2011	8:43:32 PM	SiCl4 post valve closed
8/28/2011	8:43:32 PM	Bypass valve closed
8/28/2011	8:43:32 PM	Bubbler valve closed
8/28/2011	8:43:32 PM	Main Vac valve opened
8/28/2011	8:43:32 PM	Helium MFC set to  0.000000
8/28/2011	8:43:32 PM	H2 MFC set to  0.000000
8/28/2011	8:43:32 PM	BCl3 MFC set to  0.000000
8/28/2011	8:43:32 PM	PHl3 MFC set to  0.000000
8/28/2011	8:43:32 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:43:32 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:43:32 PM	Tube furnace set to 0
8/28/2011	8:44:02 PM	H2 valve closed
8/28/2011	8:44:02 PM	BCl3 valve closed
8/28/2011	8:44:02 PM	PH3 valve closed
8/28/2011	8:44:02 PM	SiCl4 pre valve closed
8/28/2011	8:44:02 PM	SiCl4 post valve closed
8/28/2011	8:44:02 PM	Bypass valve closed
8/28/2011	8:44:02 PM	Bubbler valve closed
8/28/2011	8:44:02 PM	Helium valve opened
8/28/2011	8:44:02 PM	Main Vac valve opened
8/28/2011	8:44:02 PM	Helium MFC set to  20.000000
8/28/2011	8:44:02 PM	H2 MFC set to  0.000000
8/28/2011	8:44:02 PM	BCl3 MFC set to  0.000000
8/28/2011	8:44:02 PM	PHl3 MFC set to  0.000000
8/28/2011	8:44:02 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:44:02 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:44:03 PM	Tube furnace set to 0
8/28/2011	8:44:33 PM	Helium valve closed
8/28/2011	8:44:33 PM	H2 valve closed
8/28/2011	8:44:33 PM	BCl3 valve closed
8/28/2011	8:44:33 PM	PH3 valve closed
8/28/2011	8:44:33 PM	SiCl4 pre valve closed
8/28/2011	8:44:33 PM	SiCl4 post valve closed
8/28/2011	8:44:33 PM	Bypass valve closed
8/28/2011	8:44:33 PM	Bubbler valve closed
8/28/2011	8:44:33 PM	Main Vac valve opened
8/28/2011	8:44:33 PM	Helium MFC set to  0.000000
8/28/2011	8:44:33 PM	H2 MFC set to  0.000000
8/28/2011	8:44:33 PM	BCl3 MFC set to  0.000000
8/28/2011	8:44:33 PM	PHl3 MFC set to  0.000000
8/28/2011	8:44:33 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:44:33 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:44:33 PM	Tube furnace set to 0
8/28/2011	8:45:03 PM	H2 valve closed
8/28/2011	8:45:03 PM	BCl3 valve closed
8/28/2011	8:45:03 PM	PH3 valve closed
8/28/2011	8:45:03 PM	SiCl4 pre valve closed
8/28/2011	8:45:03 PM	SiCl4 post valve closed
8/28/2011	8:45:03 PM	Bypass valve closed
8/28/2011	8:45:03 PM	Bubbler valve closed
8/28/2011	8:45:03 PM	Helium valve opened
8/28/2011	8:45:03 PM	Main Vac valve opened
8/28/2011	8:45:03 PM	Helium MFC set to  20.000000
8/28/2011	8:45:03 PM	H2 MFC set to  0.000000
8/28/2011	8:45:03 PM	BCl3 MFC set to  0.000000
8/28/2011	8:45:03 PM	PHl3 MFC set to  0.000000
8/28/2011	8:45:03 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:45:03 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:45:03 PM	Tube furnace set to 0
8/28/2011	8:45:33 PM	Helium valve closed
8/28/2011	8:45:33 PM	H2 valve closed
8/28/2011	8:45:33 PM	BCl3 valve closed
8/28/2011	8:45:33 PM	PH3 valve closed
8/28/2011	8:45:33 PM	SiCl4 pre valve closed
8/28/2011	8:45:33 PM	SiCl4 post valve closed
8/28/2011	8:45:33 PM	Bypass valve closed
8/28/2011	8:45:33 PM	Bubbler valve closed
8/28/2011	8:45:33 PM	Main Vac valve opened
8/28/2011	8:45:33 PM	Helium MFC set to  0.000000
8/28/2011	8:45:33 PM	H2 MFC set to  0.000000
8/28/2011	8:45:33 PM	BCl3 MFC set to  0.000000
8/28/2011	8:45:33 PM	PHl3 MFC set to  0.000000
8/28/2011	8:45:33 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:45:33 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:45:33 PM	Tube furnace set to 0
8/28/2011	8:46:03 PM	H2 valve closed
8/28/2011	8:46:03 PM	BCl3 valve closed
8/28/2011	8:46:03 PM	PH3 valve closed
8/28/2011	8:46:03 PM	SiCl4 pre valve closed
8/28/2011	8:46:03 PM	SiCl4 post valve closed
8/28/2011	8:46:03 PM	Bypass valve closed
8/28/2011	8:46:03 PM	Bubbler valve closed
8/28/2011	8:46:03 PM	Helium valve opened
8/28/2011	8:46:03 PM	Main Vac valve opened
8/28/2011	8:46:03 PM	Helium MFC set to  20.000000
8/28/2011	8:46:03 PM	H2 MFC set to  0.000000
8/28/2011	8:46:03 PM	BCl3 MFC set to  0.000000
8/28/2011	8:46:03 PM	PHl3 MFC set to  0.000000
8/28/2011	8:46:03 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:46:03 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:46:03 PM	Tube furnace set to 0
8/28/2011	8:46:33 PM	Helium valve closed
8/28/2011	8:46:33 PM	H2 valve closed
8/28/2011	8:46:33 PM	BCl3 valve closed
8/28/2011	8:46:33 PM	PH3 valve closed
8/28/2011	8:46:33 PM	SiCl4 pre valve closed
8/28/2011	8:46:33 PM	SiCl4 post valve closed
8/28/2011	8:46:33 PM	Bypass valve closed
8/28/2011	8:46:33 PM	Bubbler valve closed
8/28/2011	8:46:33 PM	Main Vac valve opened
8/28/2011	8:46:33 PM	Helium MFC set to  0.000000
8/28/2011	8:46:33 PM	H2 MFC set to  0.000000
8/28/2011	8:46:33 PM	BCl3 MFC set to  0.000000
8/28/2011	8:46:33 PM	PHl3 MFC set to  0.000000
8/28/2011	8:46:33 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:46:33 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:46:34 PM	Tube furnace set to 0
8/28/2011	8:47:03 PM	Run aborted at 8:47 PM
8/28/2011	8:47:03 PM	Helium valve closed
8/28/2011	8:47:03 PM	H2 valve closed
8/28/2011	8:47:03 PM	BCl3 valve closed
8/28/2011	8:47:03 PM	PH3 valve closed
8/28/2011	8:47:03 PM	SiCl4 pre valve closed
8/28/2011	8:47:03 PM	SiCl4 post valve closed
8/28/2011	8:47:03 PM	Bypass valve closed
8/28/2011	8:47:03 PM	Main Vac valve closed
8/28/2011	8:47:03 PM	Bubbler valve closed
8/28/2011	8:47:03 PM	Helium MFC set to  0.000000
8/28/2011	8:47:03 PM	H2 MFC set to  0.000000
8/28/2011	8:47:03 PM	BCl3 MFC set to  0.000000
8/28/2011	8:47:03 PM	PHl3 MFC set to  0.000000
8/28/2011	8:47:03 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:47:04 PM	Tube furnace set to 0
8/28/2011	8:47:20 PM	Main Vac valve opened
8/28/2011	8:49:54 PM	Recipe started at 8:49 PM
8/28/2011	8:49:54 PM	Helium valve closed
8/28/2011	8:49:54 PM	H2 valve closed
8/28/2011	8:49:54 PM	BCl3 valve closed
8/28/2011	8:49:54 PM	PH3 valve closed
8/28/2011	8:49:54 PM	SiCl4 pre valve closed
8/28/2011	8:49:54 PM	SiCl4 post valve closed
8/28/2011	8:49:54 PM	Main Vac valve closed
8/28/2011	8:49:54 PM	Bypass valve closed
8/28/2011	8:49:54 PM	Bubbler valve closed
8/28/2011	8:49:54 PM	Helium MFC set to  0.000000
8/28/2011	8:49:54 PM	H2 MFC set to  0.000000
8/28/2011	8:49:54 PM	BCl3 MFC set to  0.000000
8/28/2011	8:49:54 PM	PHl3 MFC set to  0.000000
8/28/2011	8:49:54 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:49:54 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:49:55 PM	Tube furnace set to 0
8/28/2011	8:49:58 PM	H2 valve closed
8/28/2011	8:49:58 PM	BCl3 valve closed
8/28/2011	8:49:58 PM	PH3 valve closed
8/28/2011	8:49:58 PM	SiCl4 pre valve closed
8/28/2011	8:49:58 PM	SiCl4 post valve closed
8/28/2011	8:49:58 PM	Main Vac valve closed
8/28/2011	8:49:58 PM	Bypass valve closed
8/28/2011	8:49:58 PM	Bubbler valve closed
8/28/2011	8:49:58 PM	Helium valve opened
8/28/2011	8:49:58 PM	Helium MFC set to  500.000000
8/28/2011	8:49:58 PM	H2 MFC set to  0.000000
8/28/2011	8:49:58 PM	BCl3 MFC set to  0.000000
8/28/2011	8:49:58 PM	PHl3 MFC set to  0.000000
8/28/2011	8:49:58 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:49:58 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:49:58 PM	Tube furnace set to 0
8/28/2011	8:51:04 PM	H2 valve closed
8/28/2011	8:51:04 PM	BCl3 valve closed
8/28/2011	8:51:04 PM	PH3 valve closed
8/28/2011	8:51:04 PM	SiCl4 pre valve closed
8/28/2011	8:51:04 PM	SiCl4 post valve closed
8/28/2011	8:51:04 PM	Main Vac valve closed
8/28/2011	8:51:04 PM	Bypass valve closed
8/28/2011	8:51:04 PM	Helium valve opened
8/28/2011	8:51:04 PM	Bubbler valve opened
8/28/2011	8:51:04 PM	Helium MFC set to  500.000000
8/28/2011	8:51:04 PM	H2 MFC set to  0.000000
8/28/2011	8:51:04 PM	BCl3 MFC set to  0.000000
8/28/2011	8:51:04 PM	PHl3 MFC set to  0.000000
8/28/2011	8:51:04 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:51:04 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:51:04 PM	Tube furnace set to 0
8/28/2011	8:51:34 PM	Helium valve closed
8/28/2011	8:51:34 PM	H2 valve closed
8/28/2011	8:51:34 PM	BCl3 valve closed
8/28/2011	8:51:34 PM	PH3 valve closed
8/28/2011	8:51:34 PM	SiCl4 pre valve closed
8/28/2011	8:51:34 PM	SiCl4 post valve closed
8/28/2011	8:51:34 PM	Main Vac valve closed
8/28/2011	8:51:34 PM	Bubbler valve closed
8/28/2011	8:51:34 PM	Bypass valve opened
8/28/2011	8:51:34 PM	Helium MFC set to  0.000000
8/28/2011	8:51:34 PM	H2 MFC set to  0.000000
8/28/2011	8:51:34 PM	BCl3 MFC set to  0.000000
8/28/2011	8:51:34 PM	PHl3 MFC set to  0.000000
8/28/2011	8:51:34 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:51:34 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:51:34 PM	Tube furnace set to 0
8/28/2011	8:52:26 PM	Helium valve closed
8/28/2011	8:52:26 PM	H2 valve closed
8/28/2011	8:52:26 PM	BCl3 valve closed
8/28/2011	8:52:26 PM	PH3 valve closed
8/28/2011	8:52:26 PM	SiCl4 pre valve closed
8/28/2011	8:52:26 PM	SiCl4 post valve closed
8/28/2011	8:52:26 PM	Main Vac valve closed
8/28/2011	8:52:26 PM	Bubbler valve closed
8/28/2011	8:52:26 PM	Bypass valve opened
8/28/2011	8:52:26 PM	Helium MFC set to  0.000000
8/28/2011	8:52:26 PM	H2 MFC set to  0.000000
8/28/2011	8:52:26 PM	BCl3 MFC set to  0.000000
8/28/2011	8:52:26 PM	PHl3 MFC set to  0.000000
8/28/2011	8:52:26 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:52:26 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:52:26 PM	Tube furnace set to 0
8/28/2011	8:53:26 PM	Helium valve closed
8/28/2011	8:53:26 PM	H2 valve closed
8/28/2011	8:53:26 PM	BCl3 valve closed
8/28/2011	8:53:26 PM	PH3 valve closed
8/28/2011	8:53:26 PM	SiCl4 pre valve closed
8/28/2011	8:53:26 PM	SiCl4 post valve closed
8/28/2011	8:53:26 PM	Bypass valve closed
8/28/2011	8:53:26 PM	Bubbler valve closed
8/28/2011	8:53:26 PM	Main Vac valve opened
8/28/2011	8:53:26 PM	Helium MFC set to  0.000000
8/28/2011	8:53:26 PM	H2 MFC set to  0.000000
8/28/2011	8:53:26 PM	BCl3 MFC set to  0.000000
8/28/2011	8:53:26 PM	PHl3 MFC set to  0.000000
8/28/2011	8:53:26 PM	SiCl4 MFC set to  0.000000
8/28/2011	8:53:26 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	8:53:27 PM	Tube furnace set to 0
8/28/2011	9:23:27 PM	Helium valve closed
8/28/2011	9:23:27 PM	H2 valve closed
8/28/2011	9:23:27 PM	BCl3 valve closed
8/28/2011	9:23:27 PM	PH3 valve closed
8/28/2011	9:23:27 PM	SiCl4 pre valve closed
8/28/2011	9:23:27 PM	SiCl4 post valve closed
8/28/2011	9:23:27 PM	Bypass valve closed
8/28/2011	9:23:27 PM	Bubbler valve closed
8/28/2011	9:23:27 PM	Main Vac valve opened
8/28/2011	9:23:27 PM	Helium MFC set to  0.000000
8/28/2011	9:23:27 PM	H2 MFC set to  0.000000
8/28/2011	9:23:27 PM	BCl3 MFC set to  0.000000
8/28/2011	9:23:27 PM	PHl3 MFC set to  0.000000
8/28/2011	9:23:27 PM	SiCl4 MFC set to  0.000000
8/28/2011	9:23:27 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	9:23:27 PM	Tube furnace set to 1000
8/28/2011	9:53:27 PM	Helium valve closed
8/28/2011	9:53:27 PM	BCl3 valve closed
8/28/2011	9:53:27 PM	PH3 valve closed
8/28/2011	9:53:27 PM	SiCl4 pre valve closed
8/28/2011	9:53:27 PM	SiCl4 post valve closed
8/28/2011	9:53:27 PM	Main Vac valve closed
8/28/2011	9:53:27 PM	Bypass valve closed
8/28/2011	9:53:27 PM	Bubbler valve closed
8/28/2011	9:53:27 PM	H2 valve opened
8/28/2011	9:53:27 PM	Helium MFC set to  0.000000
8/28/2011	9:53:27 PM	H2 MFC set to  500.000000
8/28/2011	9:53:27 PM	BCl3 MFC set to  0.000000
8/28/2011	9:53:27 PM	PHl3 MFC set to  0.000000
8/28/2011	9:53:27 PM	SiCl4 MFC set to  0.000000
8/28/2011	9:53:27 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	9:53:27 PM	Tube furnace set to 1000
8/28/2011	9:54:22 PM	Helium valve closed
8/28/2011	9:54:22 PM	BCl3 valve closed
8/28/2011	9:54:22 PM	PH3 valve closed
8/28/2011	9:54:22 PM	SiCl4 pre valve closed
8/28/2011	9:54:22 PM	SiCl4 post valve closed
8/28/2011	9:54:22 PM	Main Vac valve closed
8/28/2011	9:54:22 PM	Bypass valve closed
8/28/2011	9:54:22 PM	H2 valve opened
8/28/2011	9:54:22 PM	Bubbler valve opened
8/28/2011	9:54:22 PM	Helium MFC set to  0.000000
8/28/2011	9:54:22 PM	H2 MFC set to  500.000000
8/28/2011	9:54:22 PM	BCl3 MFC set to  0.000000
8/28/2011	9:54:22 PM	PHl3 MFC set to  0.000000
8/28/2011	9:54:22 PM	SiCl4 MFC set to  0.000000
8/28/2011	9:54:22 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	9:54:23 PM	Tube furnace set to 1000
8/28/2011	10:14:23 PM	Helium valve closed
8/28/2011	10:14:23 PM	PH3 valve closed
8/28/2011	10:14:23 PM	Main Vac valve closed
8/28/2011	10:14:23 PM	Bypass valve closed
8/28/2011	10:14:23 PM	H2 valve opened
8/28/2011	10:14:23 PM	BCl3 valve opened
8/28/2011	10:14:23 PM	SiCl4 pre valve opened
8/28/2011	10:14:23 PM	SiCl4 post valve opened
8/28/2011	10:14:23 PM	Bubbler valve opened
8/28/2011	10:14:23 PM	Helium MFC set to  0.000000
8/28/2011	10:14:23 PM	H2 MFC set to  500.000000
8/28/2011	10:14:23 PM	BCl3 MFC set to  2.500000
8/28/2011	10:14:23 PM	PHl3 MFC set to  0.000000
8/28/2011	10:14:23 PM	SiCl4 MFC set to  50.000000
8/28/2011	10:14:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	10:14:23 PM	Tube furnace set to 1000
8/28/2011	10:24:23 PM	Helium valve closed
8/28/2011	10:24:23 PM	BCl3 valve closed
8/28/2011	10:24:23 PM	PH3 valve closed
8/28/2011	10:24:23 PM	SiCl4 pre valve closed
8/28/2011	10:24:23 PM	SiCl4 post valve closed
8/28/2011	10:24:23 PM	Main Vac valve closed
8/28/2011	10:24:23 PM	Bypass valve closed
8/28/2011	10:24:23 PM	H2 valve opened
8/28/2011	10:24:23 PM	Bubbler valve opened
8/28/2011	10:24:23 PM	Helium MFC set to  0.000000
8/28/2011	10:24:23 PM	H2 MFC set to  500.000000
8/28/2011	10:24:23 PM	BCl3 MFC set to  0.000000
8/28/2011	10:24:23 PM	PHl3 MFC set to  0.000000
8/28/2011	10:24:23 PM	SiCl4 MFC set to  0.000000
8/28/2011	10:24:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	10:24:23 PM	Tube furnace set to 0
8/28/2011	10:29:23 PM	H2 valve closed
8/28/2011	10:29:23 PM	BCl3 valve closed
8/28/2011	10:29:23 PM	PH3 valve closed
8/28/2011	10:29:23 PM	SiCl4 pre valve closed
8/28/2011	10:29:23 PM	SiCl4 post valve closed
8/28/2011	10:29:23 PM	Main Vac valve closed
8/28/2011	10:29:23 PM	Bypass valve closed
8/28/2011	10:29:23 PM	Helium valve opened
8/28/2011	10:29:23 PM	Bubbler valve opened
8/28/2011	10:29:23 PM	Helium MFC set to  500.000000
8/28/2011	10:29:23 PM	H2 MFC set to  0.000000
8/28/2011	10:29:23 PM	BCl3 MFC set to  0.000000
8/28/2011	10:29:23 PM	PHl3 MFC set to  0.000000
8/28/2011	10:29:23 PM	SiCl4 MFC set to  0.000000
8/28/2011	10:29:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	10:29:23 PM	Tube furnace set to 0
8/28/2011	10:59:23 PM	Helium valve closed
8/28/2011	10:59:23 PM	H2 valve closed
8/28/2011	10:59:23 PM	BCl3 valve closed
8/28/2011	10:59:23 PM	PH3 valve closed
8/28/2011	10:59:23 PM	SiCl4 pre valve closed
8/28/2011	10:59:23 PM	SiCl4 post valve closed
8/28/2011	10:59:23 PM	Main Vac valve closed
8/28/2011	10:59:23 PM	Bypass valve closed
8/28/2011	10:59:23 PM	Bubbler valve closed
8/28/2011	10:59:23 PM	Helium MFC set to  0.000000
8/28/2011	10:59:23 PM	H2 MFC set to  0.000000
8/28/2011	10:59:23 PM	BCl3 MFC set to  0.000000
8/28/2011	10:59:23 PM	PHl3 MFC set to  0.000000
8/28/2011	10:59:23 PM	SiCl4 MFC set to  0.000000
8/28/2011	10:59:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	10:59:23 PM	Tube furnace set to 0
8/28/2011	11:29:23 PM	Helium valve closed
8/28/2011	11:29:23 PM	H2 valve closed
8/28/2011	11:29:23 PM	BCl3 valve closed
8/28/2011	11:29:23 PM	PH3 valve closed
8/28/2011	11:29:23 PM	SiCl4 pre valve closed
8/28/2011	11:29:23 PM	SiCl4 post valve closed
8/28/2011	11:29:23 PM	Main Vac valve closed
8/28/2011	11:29:23 PM	Bubbler valve closed
8/28/2011	11:29:23 PM	Bypass valve opened
8/28/2011	11:29:23 PM	Helium MFC set to  0.000000
8/28/2011	11:29:23 PM	H2 MFC set to  0.000000
8/28/2011	11:29:23 PM	BCl3 MFC set to  0.000000
8/28/2011	11:29:23 PM	PHl3 MFC set to  0.000000
8/28/2011	11:29:23 PM	SiCl4 MFC set to  0.000000
8/28/2011	11:29:23 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:29:23 PM	Tube furnace set to 0
8/28/2011	11:30:13 PM	Helium valve closed
8/28/2011	11:30:13 PM	H2 valve closed
8/28/2011	11:30:13 PM	BCl3 valve closed
8/28/2011	11:30:13 PM	PH3 valve closed
8/28/2011	11:30:13 PM	SiCl4 pre valve closed
8/28/2011	11:30:13 PM	SiCl4 post valve closed
8/28/2011	11:30:13 PM	Main Vac valve closed
8/28/2011	11:30:13 PM	Bubbler valve closed
8/28/2011	11:30:13 PM	Bypass valve opened
8/28/2011	11:30:13 PM	Helium MFC set to  0.000000
8/28/2011	11:30:13 PM	H2 MFC set to  0.000000
8/28/2011	11:30:13 PM	BCl3 MFC set to  0.000000
8/28/2011	11:30:13 PM	PHl3 MFC set to  0.000000
8/28/2011	11:30:13 PM	SiCl4 MFC set to  0.000000
8/28/2011	11:30:13 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:30:13 PM	Tube furnace set to 0
8/28/2011	11:32:13 PM	Helium valve closed
8/28/2011	11:32:13 PM	H2 valve closed
8/28/2011	11:32:13 PM	BCl3 valve closed
8/28/2011	11:32:13 PM	PH3 valve closed
8/28/2011	11:32:13 PM	SiCl4 pre valve closed
8/28/2011	11:32:13 PM	SiCl4 post valve closed
8/28/2011	11:32:13 PM	Bypass valve closed
8/28/2011	11:32:13 PM	Bubbler valve closed
8/28/2011	11:32:13 PM	Main Vac valve opened
8/28/2011	11:32:13 PM	Helium MFC set to  0.000000
8/28/2011	11:32:13 PM	H2 MFC set to  0.000000
8/28/2011	11:32:13 PM	BCl3 MFC set to  0.000000
8/28/2011	11:32:13 PM	PHl3 MFC set to  0.000000
8/28/2011	11:32:13 PM	SiCl4 MFC set to  0.000000
8/28/2011	11:32:13 PM	Bypass solenoid MFC set to  0.000000
8/28/2011	11:32:13 PM	Tube furnace set to 0
8/28/2011	11:32:14 PM	Run finished at 11:32 PM
